Engineering & Materials Science
Argon
14%
Atoms
13%
Chemical analysis
41%
Fluxes
10%
Ion beams
18%
Ion bombardment
20%
Ions
59%
Microstructure
8%
Nitrides
77%
Nitrogen
59%
Partial pressure
15%
Sputtering
16%
Substrates
9%
Temperature
10%
Transmission electron microscopy
13%
Zirconium
81%
Physics & Astronomy
argon
10%
arrivals
25%
atoms
6%
bombardment
12%
energy
7%
grain size
9%
ion beams
10%
ions
30%
microstructure
7%
nitrogen
47%
partial pressure
12%
sputtering
10%
temperature
7%
transmission electron microscopy
8%
zirconium nitrides
100%
Chemistry
Energy
12%
Grain Size
12%
Ion
25%
Ion Beam Sputtering
20%
Ion Bombardment
16%
Liquid Film
31%
Microstructure
8%
Nitride
62%
Nitrogen
39%
Partial Pressure
12%
Polycrystalline Solid
11%