Computational solution of the atomic mixing equations

S. M. Kirkup, M. Wadsworth, D. G. Armour, R. Badheka, J. A. Van Den Berg

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The atomic mixing model that forms the basis of the IMPETUS software is described in detail. The model simulates the mixing and particle emission that occurs when a solid is bombarded with energetic particles, such as in SIMS or SNMS. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle yield and the surface recession speed are described. The material volume concentrations are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Results from the application of IMPETUS II to a number of typical structures are given.

Original languageEnglish
Pages (from-to)189-205
Number of pages17
JournalInternational Journal of Numerical Modelling: Electronic Networks, Devices and Fields
Volume11
Issue number4
DOIs
Publication statusPublished - 18 Dec 1998
Externally publishedYes

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Secondary ion mass spectrometry
Partial differential equations
Finite element method
Partial differential equation
Finite Element Method
Software
Computing
Energy
Modeling
Model

Cite this

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Computational solution of the atomic mixing equations. / Kirkup, S. M.; Wadsworth, M.; Armour, D. G.; Badheka, R.; Van Den Berg, J. A.

In: International Journal of Numerical Modelling: Electronic Networks, Devices and Fields, Vol. 11, No. 4, 18.12.1998, p. 189-205.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Computational solution of the atomic mixing equations

AU - Kirkup, S. M.

AU - Wadsworth, M.

AU - Armour, D. G.

AU - Badheka, R.

AU - Van Den Berg, J. A.

PY - 1998/12/18

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