Computational solution of the atomic mixing equations

S. M. Kirkup; M. Wadsworth; D. G. Armour; R. Badheka; J. A. Van Den Berg

doi:10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A

Computational solution of the atomic mixing equations

S. M. Kirkup, M. Wadsworth, D. G. Armour, R. Badheka, J. A. Van Den Berg

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The atomic mixing model that forms the basis of the IMPETUS software is described in detail. The model simulates the mixing and particle emission that occurs when a solid is bombarded with energetic particles, such as in SIMS or SNMS. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle yield and the surface recession speed are described. The material volume concentrations are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Results from the application of IMPETUS II to a number of typical structures are given.

Original language	English
Pages (from-to)	189-205
Number of pages	17
Journal	International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
Volume	11
Issue number	4
DOIs	https://doi.org/10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A
Publication status	Published - 18 Dec 1998
Externally published	Yes

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10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A

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title = "Computational solution of the atomic mixing equations",

abstract = "The atomic mixing model that forms the basis of the IMPETUS software is described in detail. The model simulates the mixing and particle emission that occurs when a solid is bombarded with energetic particles, such as in SIMS or SNMS. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle yield and the surface recession speed are described. The material volume concentrations are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Results from the application of IMPETUS II to a number of typical structures are given.",

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T1 - Computational solution of the atomic mixing equations

AU - Kirkup, S. M.

AU - Wadsworth, M.

AU - Armour, D. G.

AU - Badheka, R.

AU - Van Den Berg, J. A.

PY - 1998/12/18

Y1 - 1998/12/18

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AB - The atomic mixing model that forms the basis of the IMPETUS software is described in detail. The model simulates the mixing and particle emission that occurs when a solid is bombarded with energetic particles, such as in SIMS or SNMS. The methods employed for computing the deposition of the bombarding particles and their energies along with the modelling of the particle yield and the surface recession speed are described. The material volume concentrations are governed by a set of partial differential equations. A description of the finite element method that is employed for their solution is given. Results from the application of IMPETUS II to a number of typical structures are given.

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DO - 10.1002/(SICI)1099-1204(199807/08)11:4<189::AID-JNM301>3.0.CO;2-A

M3 - Article

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JO - International Journal of Numerical Modelling: Electronic Networks, Devices and Fields

JF - International Journal of Numerical Modelling: Electronic Networks, Devices and Fields

SN - 0894-3370

IS - 4

ER -

Computational solution of the atomic mixing equations

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