Contribution of atomic and molecular ions to dry-etch damage

L. G. Deng, M. Rahman, J. A. Van Den Berg, C. D.W. Wilkinson

Research output: Contribution to journalArticle

7 Citations (Scopus)

Fingerprint Dive into the research topics of 'Contribution of atomic and molecular ions to dry-etch damage'. Together they form a unique fingerprint.

Physics & Astronomy

Physics

General

Engineering

Chemistry and Materials