Corrected differential fitting for height extraction in chromatic confocal microscopy

Cheng Chen, Wenjun Yang, Hong Zhu, Jian Fu, Chi Zhang, Jian Wang, Xiaojun Liu, Wenlong Lu, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of »sum differences of sampling intensity». The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.

LanguageEnglish
Title of host publicationTenth International Symposium on Precision Engineering Measurements and Instrumentation
EditorsJie Lin, Jiubin Tan
PublisherSPIE
Volume11053
ISBN (Electronic)9781510627819
DOIs
Publication statusPublished - 7 Mar 2019
EventInternational Symposium on Precision Engineering Measurements and Instrumentation - Kunming, China
Duration: 8 Aug 201810 Aug 2018
Conference number: 10th
http://www.ispemi-icmi.org/editorfiles/file/20180411/1523486216366096.pdf

Conference

ConferenceInternational Symposium on Precision Engineering Measurements and Instrumentation
Abbreviated titleISPEMI 2018
CountryChina
CityKunming
Period8/08/1810/08/18
Internet address

Fingerprint

Confocal Microscopy
Confocal microscopy
microscopy
Computational efficiency
Computational Efficiency
Centroid
centroids
Error Compensation
Error compensation
Confocal
Systematic Error
Systematic errors
systematic errors
High Efficiency
Differential equations
differential equations
Monte Carlo Simulation

Cite this

Chen, C., Yang, W., Zhu, H., Fu, J., Zhang, C., Wang, J., ... Jiang, X. (2019). Corrected differential fitting for height extraction in chromatic confocal microscopy. In J. Lin, & J. Tan (Eds.), Tenth International Symposium on Precision Engineering Measurements and Instrumentation (Vol. 11053). [1105322] SPIE. https://doi.org/10.1117/12.2511734
Chen, Cheng ; Yang, Wenjun ; Zhu, Hong ; Fu, Jian ; Zhang, Chi ; Wang, Jian ; Liu, Xiaojun ; Lu, Wenlong ; Jiang, Xiangqian. / Corrected differential fitting for height extraction in chromatic confocal microscopy. Tenth International Symposium on Precision Engineering Measurements and Instrumentation. editor / Jie Lin ; Jiubin Tan. Vol. 11053 SPIE, 2019.
@inproceedings{c2b4e545a84e410e8738a588653c9310,
title = "Corrected differential fitting for height extraction in chromatic confocal microscopy",
abstract = "As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of »sum differences of sampling intensity». The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.",
keywords = "confocal microscopy, corrected differential fitting algorithm, metrology, peak extraction",
author = "Cheng Chen and Wenjun Yang and Hong Zhu and Jian Fu and Chi Zhang and Jian Wang and Xiaojun Liu and Wenlong Lu and Xiangqian Jiang",
year = "2019",
month = "3",
day = "7",
doi = "10.1117/12.2511734",
language = "English",
volume = "11053",
editor = "Jie Lin and Jiubin Tan",
booktitle = "Tenth International Symposium on Precision Engineering Measurements and Instrumentation",
publisher = "SPIE",
address = "United States",

}

Chen, C, Yang, W, Zhu, H, Fu, J, Zhang, C, Wang, J, Liu, X, Lu, W & Jiang, X 2019, Corrected differential fitting for height extraction in chromatic confocal microscopy. in J Lin & J Tan (eds), Tenth International Symposium on Precision Engineering Measurements and Instrumentation. vol. 11053, 1105322, SPIE, International Symposium on Precision Engineering Measurements and Instrumentation, Kunming, China, 8/08/18. https://doi.org/10.1117/12.2511734

Corrected differential fitting for height extraction in chromatic confocal microscopy. / Chen, Cheng; Yang, Wenjun; Zhu, Hong; Fu, Jian; Zhang, Chi; Wang, Jian; Liu, Xiaojun; Lu, Wenlong; Jiang, Xiangqian.

Tenth International Symposium on Precision Engineering Measurements and Instrumentation. ed. / Jie Lin; Jiubin Tan. Vol. 11053 SPIE, 2019. 1105322.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Corrected differential fitting for height extraction in chromatic confocal microscopy

AU - Chen, Cheng

AU - Yang, Wenjun

AU - Zhu, Hong

AU - Fu, Jian

AU - Zhang, Chi

AU - Wang, Jian

AU - Liu, Xiaojun

AU - Lu, Wenlong

AU - Jiang, Xiangqian

PY - 2019/3/7

Y1 - 2019/3/7

N2 - As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of »sum differences of sampling intensity». The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.

AB - As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of »sum differences of sampling intensity». The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.

KW - confocal microscopy

KW - corrected differential fitting algorithm

KW - metrology

KW - peak extraction

UR - http://www.scopus.com/inward/record.url?scp=85062863464&partnerID=8YFLogxK

U2 - 10.1117/12.2511734

DO - 10.1117/12.2511734

M3 - Conference contribution

VL - 11053

BT - Tenth International Symposium on Precision Engineering Measurements and Instrumentation

A2 - Lin, Jie

A2 - Tan, Jiubin

PB - SPIE

ER -

Chen C, Yang W, Zhu H, Fu J, Zhang C, Wang J et al. Corrected differential fitting for height extraction in chromatic confocal microscopy. In Lin J, Tan J, editors, Tenth International Symposium on Precision Engineering Measurements and Instrumentation. Vol. 11053. SPIE. 2019. 1105322 https://doi.org/10.1117/12.2511734