Corrected differential fitting for height extraction in chromatic confocal microscopy

Cheng Chen, Wenjun Yang, Hong Zhu, Jian Fu, Chi Zhang, Jian Wang, Xiaojun Liu, Wenlong Lu, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of »sum differences of sampling intensity». The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.

Original languageEnglish
Title of host publicationTenth International Symposium on Precision Engineering Measurements and Instrumentation
EditorsJie Lin, Jiubin Tan
PublisherSPIE
Number of pages9
Volume11053
ISBN (Electronic)9781510627826
ISBN (Print)9781510627819
DOIs
Publication statusPublished - 7 Mar 2019
Event10th International Symposium on Precision Engineering Measurements and Instrumentation - Kunming, China
Duration: 8 Aug 201810 Aug 2018
Conference number: 10th
http://www.ispemi-icmi.org/editorfiles/file/20180411/1523486216366096.pdf

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume11053
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference10th International Symposium on Precision Engineering Measurements and Instrumentation
Abbreviated titleISPEMI 2018
CountryChina
CityKunming
Period8/08/1810/08/18
Internet address

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  • Cite this

    Chen, C., Yang, W., Zhu, H., Fu, J., Zhang, C., Wang, J., Liu, X., Lu, W., & Jiang, X. (2019). Corrected differential fitting for height extraction in chromatic confocal microscopy. In J. Lin, & J. Tan (Eds.), Tenth International Symposium on Precision Engineering Measurements and Instrumentation (Vol. 11053). [1105322] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11053). SPIE. https://doi.org/10.1117/12.2511734