Correction for lateral distortion in coherence scanning interferometry

Andrew Henning; Claudiu Giusca; Alistair Forbes; Ian Smith; Richard Leach; Jeremy Coupland; Rahul Mandal

doi:10.1016/j.cirp.2013.03.026

Correction for lateral distortion in coherence scanning interferometry

Andrew Henning, Claudiu Giusca, Alistair Forbes, Ian Smith, Richard Leach, Jeremy Coupland, Rahul Mandal

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

For a complete calibration of optical surface topography measuring instruments, which encompass their ability to measure slope and curvature, a determination of their optical transfer function is required. Errors induced by non-linearity of the scales of the instrument can affect their shift invariant properties, which in turn affect their transfer function. The non-linearity can be caused by distortion produced by the quality of the optical setup. A method to develop a correction model that combines a simple model of optical distortion with error separation techniques is discussed. Experimental tests of the method are presented and measurement uncertainties are investigated.

Original language	English
Pages (from-to)	547-550
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	62
Issue number	1
Early online date	13 Apr 2013
DOIs	https://doi.org/10.1016/j.cirp.2013.03.026
Publication status	Published - 2013
Externally published	Yes

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title = "Correction for lateral distortion in coherence scanning interferometry",

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T1 - Correction for lateral distortion in coherence scanning interferometry

AU - Henning, Andrew

AU - Giusca, Claudiu

AU - Forbes, Alistair

AU - Smith, Ian

AU - Leach, Richard

AU - Coupland, Jeremy

AU - Mandal, Rahul

PY - 2013

Y1 - 2013

N2 - For a complete calibration of optical surface topography measuring instruments, which encompass their ability to measure slope and curvature, a determination of their optical transfer function is required. Errors induced by non-linearity of the scales of the instrument can affect their shift invariant properties, which in turn affect their transfer function. The non-linearity can be caused by distortion produced by the quality of the optical setup. A method to develop a correction model that combines a simple model of optical distortion with error separation techniques is discussed. Experimental tests of the method are presented and measurement uncertainties are investigated.

AB - For a complete calibration of optical surface topography measuring instruments, which encompass their ability to measure slope and curvature, a determination of their optical transfer function is required. Errors induced by non-linearity of the scales of the instrument can affect their shift invariant properties, which in turn affect their transfer function. The non-linearity can be caused by distortion produced by the quality of the optical setup. A method to develop a correction model that combines a simple model of optical distortion with error separation techniques is discussed. Experimental tests of the method are presented and measurement uncertainties are investigated.

KW - Distortion correction

KW - Measurement

KW - Surface analysis

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EP - 550

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JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 1

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Correction for lateral distortion in coherence scanning interferometry

Abstract

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