Correction for lateral distortion in coherence scanning interferometry

Andrew Henning, Claudiu Giusca, Alistair Forbes, Ian Smith, Richard Leach, Jeremy Coupland, Rahul Mandal

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

For a complete calibration of optical surface topography measuring instruments, which encompass their ability to measure slope and curvature, a determination of their optical transfer function is required. Errors induced by non-linearity of the scales of the instrument can affect their shift invariant properties, which in turn affect their transfer function. The non-linearity can be caused by distortion produced by the quality of the optical setup. A method to develop a correction model that combines a simple model of optical distortion with error separation techniques is discussed. Experimental tests of the method are presented and measurement uncertainties are investigated.

Original languageEnglish
Pages (from-to)547-550
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume62
Issue number1
Early online date13 Apr 2013
DOIs
Publication statusPublished - 2013
Externally publishedYes

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Interferometry
Scanning
Optical transfer function
Surface topography
Transfer functions
Calibration
Uncertainty

Cite this

Henning, Andrew ; Giusca, Claudiu ; Forbes, Alistair ; Smith, Ian ; Leach, Richard ; Coupland, Jeremy ; Mandal, Rahul. / Correction for lateral distortion in coherence scanning interferometry. In: CIRP Annals - Manufacturing Technology. 2013 ; Vol. 62, No. 1. pp. 547-550.
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Henning, A, Giusca, C, Forbes, A, Smith, I, Leach, R, Coupland, J & Mandal, R 2013, 'Correction for lateral distortion in coherence scanning interferometry', CIRP Annals - Manufacturing Technology, vol. 62, no. 1, pp. 547-550. https://doi.org/10.1016/j.cirp.2013.03.026

Correction for lateral distortion in coherence scanning interferometry. / Henning, Andrew; Giusca, Claudiu; Forbes, Alistair; Smith, Ian; Leach, Richard; Coupland, Jeremy; Mandal, Rahul.

In: CIRP Annals - Manufacturing Technology, Vol. 62, No. 1, 2013, p. 547-550.

Research output: Contribution to journalArticle

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AU - Henning, Andrew

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AU - Forbes, Alistair

AU - Smith, Ian

AU - Leach, Richard

AU - Coupland, Jeremy

AU - Mandal, Rahul

PY - 2013

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