Correction for lateral distortion in coherence scanning interferometry

Andrew Henning, Claudiu Giusca, Alistair Forbes, Ian Smith, Richard Leach, Jeremy Coupland, Rahul Mandal

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

For a complete calibration of optical surface topography measuring instruments, which encompass their ability to measure slope and curvature, a determination of their optical transfer function is required. Errors induced by non-linearity of the scales of the instrument can affect their shift invariant properties, which in turn affect their transfer function. The non-linearity can be caused by distortion produced by the quality of the optical setup. A method to develop a correction model that combines a simple model of optical distortion with error separation techniques is discussed. Experimental tests of the method are presented and measurement uncertainties are investigated.

Original languageEnglish
Pages (from-to)547-550
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume62
Issue number1
Early online date13 Apr 2013
DOIs
Publication statusPublished - 2013
Externally publishedYes

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