Abstract
Digital holographic microscopy is a promising method for measuring complex micro-structures with high slopes. A quasi-common path interferometric apparatus is adopted to overcome environmental disturbances, and an acousto-optic tunable filter is used to obtain multi-wavelength holograms. However, the phase shifting error caused by the acousto-optic tunable filter reduces the measurement accuracy and, in turn, the reconstructed topographies are erroneous. In this paper, an accurate reconstruction approach is proposed. It corrects the phase-shifting errors by minimizing the difference between the ideal interferograms and the recorded ones. The restriction on the step number and uniformity of the phase shifting is relaxed in the interferometry, and the measurement accuracy for complex surfaces can also be improved. The universality and superiority of the proposed method are demonstrated by practical experiments and comparison to other measurement methods.
| Original language | English |
|---|---|
| Article number | 055002 |
| Number of pages | 9 |
| Journal | Measurement Science and Technology |
| Volume | 29 |
| Issue number | 5 |
| Early online date | 26 Mar 2018 |
| DOIs | |
| Publication status | Published - May 2018 |
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Correction of phase-shifting error in wavelength scanning digital holographic microscopy. / Zhang, Xiaolei; Wang, Jie; Zhang, Xiangchao; Xu, Min; Zhang, Hao; Jiang, Xiangqian.
In: Measurement Science and Technology, Vol. 29, No. 5, 055002, 05.2018.Research output: Contribution to journal › Article
TY - JOUR
T1 - Correction of phase-shifting error in wavelength scanning digital holographic microscopy
AU - Zhang, Xiaolei
AU - Wang, Jie
AU - Zhang, Xiangchao
AU - Xu, Min
AU - Zhang, Hao
AU - Jiang, Xiangqian
PY - 2018/5
Y1 - 2018/5
N2 - Digital holographic microscopy is a promising method for measuring complex micro-structures with high slopes. A quasi-common path interferometric apparatus is adopted to overcome environmental disturbances, and an acousto-optic tunable filter is used to obtain multi-wavelength holograms. However, the phase shifting error caused by the acousto-optic tunable filter reduces the measurement accuracy and, in turn, the reconstructed topographies are erroneous. In this paper, an accurate reconstruction approach is proposed. It corrects the phase-shifting errors by minimizing the difference between the ideal interferograms and the recorded ones. The restriction on the step number and uniformity of the phase shifting is relaxed in the interferometry, and the measurement accuracy for complex surfaces can also be improved. The universality and superiority of the proposed method are demonstrated by practical experiments and comparison to other measurement methods.
AB - Digital holographic microscopy is a promising method for measuring complex micro-structures with high slopes. A quasi-common path interferometric apparatus is adopted to overcome environmental disturbances, and an acousto-optic tunable filter is used to obtain multi-wavelength holograms. However, the phase shifting error caused by the acousto-optic tunable filter reduces the measurement accuracy and, in turn, the reconstructed topographies are erroneous. In this paper, an accurate reconstruction approach is proposed. It corrects the phase-shifting errors by minimizing the difference between the ideal interferograms and the recorded ones. The restriction on the step number and uniformity of the phase shifting is relaxed in the interferometry, and the measurement accuracy for complex surfaces can also be improved. The universality and superiority of the proposed method are demonstrated by practical experiments and comparison to other measurement methods.
KW - digital holography
KW - microscopy
KW - phase shifting
KW - surface measurement
UR - http://www.scopus.com/inward/record.url?scp=85045620758&partnerID=8YFLogxK
U2 - 10.1088/1361-6501/aaa8c1
DO - 10.1088/1361-6501/aaa8c1
M3 - Article
AN - SCOPUS:85045620758
VL - 29
JO - Measurement Science and Technology
JF - Measurement Science and Technology
SN - 0957-0233
IS - 5
M1 - 055002
ER -