The creation of bombardment induced damage structures on a nickel (110) surface has been studied as a function of ion mass, ion energy and bombardment temperature. The damage creation curves which were measured with low energy ion scattering (LEIS) could be described by a function of the form N0[1-exp(-D/D0)] 1 2, in which D is the bombardment dose, N0 is the number of damage sites at saturation and D0 is a characteristic dose. It was found that N0 does not depend on the mass and energy of the bombarding ion or on the bombardment temperature up to 100°C. The characteristic dose D0 depends strongly on the bombardment temperature and on the ion mass. The observed energy dependence of D0 was rather weak. The results are discussed in terms of a model which takes into account clustering of vacancies which are created by sputtering of surface atoms and of annealing by diffusion of thermally activated adatoms.