Abstract
The creation of bombardment induced damage structures on a nickel (110) surface has been studied as a function of ion mass, ion energy and bombardment temperature. The damage creation curves which were measured with low energy ion scattering (LEIS) could be described by a function of the form N0[1-exp(-D/D0)] 1 2, in which D is the bombardment dose, N0 is the number of damage sites at saturation and D0 is a characteristic dose. It was found that N0 does not depend on the mass and energy of the bombarding ion or on the bombardment temperature up to 100°C. The characteristic dose D0 depends strongly on the bombardment temperature and on the ion mass. The observed energy dependence of D0 was rather weak. The results are discussed in terms of a model which takes into account clustering of vacancies which are created by sputtering of surface atoms and of annealing by diffusion of thermally activated adatoms.
Original language | English |
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Pages (from-to) | 595-599 |
Number of pages | 5 |
Journal | Nuclear Instruments and Methods |
Volume | 168 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Jan 1980 |
Externally published | Yes |
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Creation of surface damage on a nickel (110) surface by bombardment with 3-30 keV noble gas ions. / Verheij, L. K.; Van Loenen, E.; Van den Berg, J. A.; Armour, D. G.
In: Nuclear Instruments and Methods, Vol. 168, No. 1-3, 01.01.1980, p. 595-599.Research output: Contribution to journal › Article
TY - JOUR
T1 - Creation of surface damage on a nickel (110) surface by bombardment with 3-30 keV noble gas ions
AU - Verheij, L. K.
AU - Van Loenen, E.
AU - Van den Berg, J. A.
AU - Armour, D. G.
PY - 1980/1/1
Y1 - 1980/1/1
N2 - The creation of bombardment induced damage structures on a nickel (110) surface has been studied as a function of ion mass, ion energy and bombardment temperature. The damage creation curves which were measured with low energy ion scattering (LEIS) could be described by a function of the form N0[1-exp(-D/D0)] 1 2, in which D is the bombardment dose, N0 is the number of damage sites at saturation and D0 is a characteristic dose. It was found that N0 does not depend on the mass and energy of the bombarding ion or on the bombardment temperature up to 100°C. The characteristic dose D0 depends strongly on the bombardment temperature and on the ion mass. The observed energy dependence of D0 was rather weak. The results are discussed in terms of a model which takes into account clustering of vacancies which are created by sputtering of surface atoms and of annealing by diffusion of thermally activated adatoms.
AB - The creation of bombardment induced damage structures on a nickel (110) surface has been studied as a function of ion mass, ion energy and bombardment temperature. The damage creation curves which were measured with low energy ion scattering (LEIS) could be described by a function of the form N0[1-exp(-D/D0)] 1 2, in which D is the bombardment dose, N0 is the number of damage sites at saturation and D0 is a characteristic dose. It was found that N0 does not depend on the mass and energy of the bombarding ion or on the bombardment temperature up to 100°C. The characteristic dose D0 depends strongly on the bombardment temperature and on the ion mass. The observed energy dependence of D0 was rather weak. The results are discussed in terms of a model which takes into account clustering of vacancies which are created by sputtering of surface atoms and of annealing by diffusion of thermally activated adatoms.
UR - http://www.scopus.com/inward/record.url?scp=30244512449&partnerID=8YFLogxK
U2 - 10.1016/0029-554X(80)91316-6
DO - 10.1016/0029-554X(80)91316-6
M3 - Article
VL - 168
SP - 595
EP - 599
JO - Nuclear Instruments and Methods
JF - Nuclear Instruments and Methods
SN - 0029-554X
IS - 1-3
ER -