@inproceedings{8ad1f1cba5d44bada5116beabe2e3a0f,
title = "Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings",
abstract = "A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.",
keywords = "Amorphous carbon, Amorphous materials, Coatings, Electron energy levels, Electron microscopes, Electron microscopy, Electron scattering, Energy dispersive spectroscopy, Energy dissipation, Magnetron sputtering, Thick films, X ray spectroscopy",
author = "J. Sharp and Muller, {I. Castillo} and P. Mandal and A. Abbas and G. West and Rainforth, {W. M.} and A. Ehiasarian and P. Hovsepian",
note = "Copyright: Copyright 2018 Elsevier B.V., All rights reserved.; 2015 Electron Microscopy and Analysis Group Conference, EMAG 2015 ; Conference date: 29-06-2015 Through 02-07-2015",
year = "2015",
month = oct,
day = "12",
doi = "10.1088/1742-6596/644/1/012011",
language = "English",
isbn = "9781510814714",
volume = "644",
series = "Journal of Physics: Conference Series",
publisher = "IOP Publishing",
pages = "41--44",
booktitle = "Electron Microscopy and Analysis Group Conference (EMAG 2015)",
address = "United Kingdom",
edition = "1",
}