Cross sectional TEM analysis of duplex HIPIMS and DC magnetron sputtered Mo and W doped carbon coatings

J. Sharp, I. Castillo Muller, P. Mandal, A. Abbas, G. West, W. M. Rainforth, A. Ehiasarian, P. Hovsepian

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

A FIB lift-out sample was made from a wear-resistant carbon coating deposited by high power impulse magnetron sputtering (HIPIMS) with Mo and W. TEM analysis found columnar grains extending the whole ∼1800 nm thick film. Within the grains, the carbon was found to be organised into clusters showing some onion-like structure, with amorphous material between them; energy dispersive X-ray spectroscopy (EDS) found these clusters to be Mo- and W-rich in a later, thinner sample of the same material. Electron energy-loss spectroscopy (EELS) showed no difference in C-K edge, implying the bonding type to be the same in cluster and matrix. These clusters were arranged into stripes parallel to the film plane, of spacing 7-8 nm; there was a modulation in spacing between clusters within these stripes that produced a second, coarser set of striations of spacing ∼37 nm.

Original languageEnglish
Title of host publicationElectron Microscopy and Analysis Group Conference (EMAG 2015)
PublisherIOP Publishing
Pages41-44
Number of pages4
Volume644
Edition1
ISBN (Print)9781510814714
DOIs
Publication statusPublished - 12 Oct 2015
Externally publishedYes
Event2015 Electron Microscopy and Analysis Group Conference - Manchester, United Kingdom
Duration: 29 Jun 20152 Jul 2015

Publication series

NameJournal of Physics: Conference Series
PublisherIOP Publishing Ltd.
Volume644
ISSN (Print)1742-6588

Conference

Conference2015 Electron Microscopy and Analysis Group Conference
Abbreviated titleEMAG 2015
CountryUnited Kingdom
CityManchester
Period29/06/152/07/15

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