Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques because it uses cylindrical lenses as the objective lens in a Michelson interferometric configuration to enable the measurement of long profiles. The adjustable profile length in our experimental setup, determined by the NA of the illuminating system and the aperture of cylindrical lenses, is up to 10 mm. To simulate real-time surface inspection, large-scale 3D surface measurement was carried out by translating the tested sample during the measurement procedure. Two step height surfaces were measured and the captured interferograms were analysed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

LanguageEnglish
Title of host publicationProceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology
EditorsR. Leach
Publishereuspen
Pages289-292
Number of pages4
Volume1
ISBN (Electronic)9780956679031
Publication statusPublished - 2014
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14
http://nanofutures.info/sites/default/files/Dubrovnik%20Call%20For%20Papers.pdf (Link to Call for Papers and Event Details)

Conference

Conference14th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2014
CountryCroatia
CityDubrovnik
Period2/06/146/06/14
OtherCome and join your international peers, maintaining their leading edge on technology, customers, partners and suppliers. Access the greatest minds in micro and nano research and development. Share knowledge and information, and stimulate conversations
Internet address

Fingerprint

Interferometry
inspection
Lenses
interferometry
Inspection
lenses
profiles
Surface measurement
translating
Fast Fourier transforms
illuminating
shot
specifications
Specifications
apertures
configurations

Cite this

Tang, D., Gao, F., & Jiang, X. (2014). Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection. In R. Leach (Ed.), Proceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology (Vol. 1, pp. 289-292). euspen.
Tang, Dawei ; Gao, F. ; Jiang, X. / Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection. Proceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology. editor / R. Leach. Vol. 1 euspen, 2014. pp. 289-292
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abstract = "This paper presents a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques because it uses cylindrical lenses as the objective lens in a Michelson interferometric configuration to enable the measurement of long profiles. The adjustable profile length in our experimental setup, determined by the NA of the illuminating system and the aperture of cylindrical lenses, is up to 10 mm. To simulate real-time surface inspection, large-scale 3D surface measurement was carried out by translating the tested sample during the measurement procedure. Two step height surfaces were measured and the captured interferograms were analysed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.",
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Tang, D, Gao, F & Jiang, X 2014, Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection. in R Leach (ed.), Proceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology. vol. 1, euspen, pp. 289-292, 14th International Conference of the European Society for Precision Engineering and Nanotechnology, Dubrovnik, Croatia, 2/06/14.

Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection. / Tang, Dawei; Gao, F.; Jiang, X.

Proceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology. ed. / R. Leach. Vol. 1 euspen, 2014. p. 289-292.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper presents a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques because it uses cylindrical lenses as the objective lens in a Michelson interferometric configuration to enable the measurement of long profiles. The adjustable profile length in our experimental setup, determined by the NA of the illuminating system and the aperture of cylindrical lenses, is up to 10 mm. To simulate real-time surface inspection, large-scale 3D surface measurement was carried out by translating the tested sample during the measurement procedure. Two step height surfaces were measured and the captured interferograms were analysed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

AB - This paper presents a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques because it uses cylindrical lenses as the objective lens in a Michelson interferometric configuration to enable the measurement of long profiles. The adjustable profile length in our experimental setup, determined by the NA of the illuminating system and the aperture of cylindrical lenses, is up to 10 mm. To simulate real-time surface inspection, large-scale 3D surface measurement was carried out by translating the tested sample during the measurement procedure. Two step height surfaces were measured and the captured interferograms were analysed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

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Tang D, Gao F, Jiang X. Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection. In Leach R, editor, Proceedings of the 14th euspen International Conference and 16th General Meeting of the European Society for Precision Engineering and Nanotechnology. Vol. 1. euspen. 2014. p. 289-292