FingerprintDive into the research topics of 'Damage accumulation and dopant migration during shallow As and Sb implantation into Si'. Together they form a unique fingerprint.
- Sort by
M. Werner, J. A. Van den Berg, D. G. Armour, W. Vandervorst, E. H.J. Collart, R. D. Goldberg, P. Bailey, T. C.Q. Noakes
Research output: Contribution to journal › Conference article › peer-review