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Damage accumulation and dopant migration during shallow As and Sb implantation into Si
M. Werner, J. A. Van den Berg, D. G. Armour, W. Vandervorst, E. H.J. Collart, R. D. Goldberg, P. Bailey, T. C.Q. Noakes
Research output: Contribution to journal › Conference article › peer-review
25
Citations
(Scopus)