Damage accumulation in neon implanted silicon

E. Oliviero, S. Peripolli, L. Amaral, P. F.P. Fichtner, M. F. Beaufort, J. F. Barbot, S. E. Donnelly

Research output: Contribution to journalArticle

23 Citations (Scopus)

Fingerprint Dive into the research topics of 'Damage accumulation in neon implanted silicon'. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials



Aerospace Sciences


Mathematical and Computer Sciences