Density functional theory study of the VmN2On (m,n = 1, 2) complexes in silicon

Stavros Christopoulos, Efstratia N. Sgourou, Alexander Chroneos, Charalampos A. Londos

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Abstract

Nitrogen is an important impurity in Czochralski grown silicon (Cz–Si) as it enhances oxygen precipitation through the formation of vacancy–nitrogen–oxygen clusters and in particular the VmN2On complexes. Here, we employ density functional theory (DFT) to predict the structure of VmN2On (m,n=1, 2). We report that the lowest energy VmN2On(m,n=1, 2) defects are very strongly bound. These results are consistent, and support the previously reported theoretical and experimental conclusions that VmN2On structures could form.
Original languageEnglish
Article number2350035
JournalModern Physics Letters B
Volume37
Issue number14
Early online date11 Apr 2023
DOIs
Publication statusPublished - 20 May 2023

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