TY - JOUR
T1 - Density functional theory study of the VmN2On (m,n = 1, 2) complexes in silicon
AU - Christopoulos, Stavros
AU - Sgourou, Efstratia N.
AU - Chroneos, Alexander
AU - Londos, Charalampos A.
N1 - Publisher Copyright:
© 2023 World Scientific Publishing Company.
PY - 2023/5/20
Y1 - 2023/5/20
N2 - Nitrogen is an important impurity in Czochralski grown silicon (Cz–Si) as it enhances oxygen precipitation through the formation of vacancy–nitrogen–oxygen clusters and in particular the VmN2On complexes. Here, we employ density functional theory (DFT) to predict the structure of VmN2On (m,n=1, 2). We report that the lowest energy VmN2On(m,n=1, 2) defects are very strongly bound. These results are consistent, and support the previously reported theoretical and experimental conclusions that VmN2On structures could form.
AB - Nitrogen is an important impurity in Czochralski grown silicon (Cz–Si) as it enhances oxygen precipitation through the formation of vacancy–nitrogen–oxygen clusters and in particular the VmN2On complexes. Here, we employ density functional theory (DFT) to predict the structure of VmN2On (m,n=1, 2). We report that the lowest energy VmN2On(m,n=1, 2) defects are very strongly bound. These results are consistent, and support the previously reported theoretical and experimental conclusions that VmN2On structures could form.
KW - Silicon
KW - Nitrogen impurity
KW - Defect clusters
KW - DFT calculations
UR - http://www.scopus.com/inward/record.url?scp=85154574102&partnerID=8YFLogxK
U2 - 10.1142/S0217984923500355
DO - 10.1142/S0217984923500355
M3 - Article
VL - 37
JO - Modern Physics Letters B
JF - Modern Physics Letters B
SN - 0217-9849
IS - 14
M1 - 2350035
ER -