TY - JOUR
T1 - Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target
AU - Azina, Clio
AU - Tunca, Bensu
AU - Petruhins, Andrejs
AU - Xin, Binbin
AU - Yildizhan, Melike
AU - Persson, Per O.Å.
AU - Vleugels, Jozef
AU - Lambrinou, Konstantina
AU - Rosen, Johanna
AU - Eklund, Per
N1 - Funding Information:
The authors acknowledge Dr. Thomas Lapauw for synthesizing the compound target. Support from the Swedish research council VR-RFI (#2017-00646_9) for the Accelerator based ion-technological centre, and from the Swedish Foundation for Strategic Research (contract RIF14-0053) for the tandem accelerator laboratory in Uppsala is gratefully acknowledged. This research has received funding from the Euratom research and training programme 2014–2018 under grant agreement No. 740415 (H2020 IL TROVATORE). We also acknowledge funding from Stiftelsen Olle Engkvist Byggmästare (grant no. 184-561), the Knut and Alice Wallenberg Foundation for Wallenberg Academy Fellowship grants and project funding (KAW 2015.0043), and the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (Faculty Grant SFO-Mat-LiU No. 2009 00971). The authors gratefully acknowledge the Research Foundation Flanders for Hercules project AKUL/1319 (CombiS(T)EM)).
Publisher Copyright:
© 2021 The Author(s)
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/6/15
Y1 - 2021/6/15
N2 - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 °C. Short deposition times yielded 30–40 nm-thick Al-containing (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 °C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 °C) to form the MAX phases.
AB - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 °C. Short deposition times yielded 30–40 nm-thick Al-containing (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 °C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 °C) to form the MAX phases.
KW - (TiZr)AlC
KW - Compound target
KW - Magnetron sputtering
KW - MAX phase solid solutio
UR - http://www.scopus.com/inward/record.url?scp=85102081667&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2021.149370
DO - 10.1016/j.apsusc.2021.149370
M3 - Article
AN - SCOPUS:85102081667
VL - 551
JO - Applications of Surface Science
JF - Applications of Surface Science
SN - 0169-4332
M1 - 149370
ER -
