Depth profile characterization of ultra shallow junction implants

Philipp Hönicke, Burkhard Beckhoff, Michael Kolbe, Damiano Giubertoni, J. Van Den Berg, Giancarlo Pepponi

Research output: Contribution to journalArticlepeer-review

47 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Depth profile characterization of ultra shallow junction implants'. Together they form a unique fingerprint.

Chemical Compounds

Medicine & Life Sciences