Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

Xiao-Dong Lu; Jane Jiang; Tie-Bang Xie; Zhu Li

doi:10.1117/12.156461

Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

Xiao-Dong Lu, Jane Jiang, Tie-Bang Xie, Zhu Li

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Pages	348-351
Number of pages	4
Volume	2101
ISBN (Print)	9780819413840
DOIs	https://doi.org/10.1117/12.156461
Publication status	Published - 22 Sep 1993
Externally published	Yes
Event	2nd International Symposium on Measurement Technology and Intelligent Instruments - Wuhan, China Duration: 29 Oct 1993 → 5 Nov 1993 Conference number: 2 https://www.worldcat.org/title/second-international-symposium-on-measurement-technology-and-intelligent-instruments-29-october-5-november-1993/oclc/62263291

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	2101
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	2nd International Symposium on Measurement Technology and Intelligent Instruments
Country/Territory	China
City	Wuhan
Period	29/10/93 → 5/11/93
Internet address	https://www.worldcat.org/title/second-international-symposium-on-measurement-technology-and-intelligent-instruments-29-october-5-november-1993/oclc/62263291

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Cite this

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title = "Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range",

abstract = "In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed. ",

keywords = "surface roughness, roughness meansurement, sensor design",

author = "Xiao-Dong Lu and Jane Jiang and Tie-Bang Xie and Zhu Li",

year = "1993",

month = sep,

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doi = "10.1117/12.156461",

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isbn = "9780819413840",

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booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "2nd International Symposium on Measurement Technology and Intelligent Instruments ; Conference date: 29-10-1993 Through 05-11-1993",

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Lu, X-D, Jiang, J, Xie, T-B & Li, Z 1993, Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2101, Proceedings of SPIE - The International Society for Optical Engineering, vol. 2101, SPIE, pp. 348-351, 2nd International Symposium on Measurement Technology and Intelligent Instruments, Wuhan, China, 29/10/93. https://doi.org/10.1117/12.156461

Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range. / Lu, Xiao-Dong; Jiang, Jane; Xie, Tie-Bang et al.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2101 SPIE, 1993. p. 348-351 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2101).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

AU - Lu, Xiao-Dong

AU - Jiang, Jane

AU - Xie, Tie-Bang

AU - Li, Zhu

N1 - Conference code: 2

PY - 1993/9/22

Y1 - 1993/9/22

N2 - In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed.

AB - In this paper a new stylus sensor is introduced which has high accuracy microdisplacement and wide dynamic range. Its resolution is O. OO5m its range of vertical measurement is mm. The sensor''s mechanical characteristics including statical and dynamic mechanical characteristics are discussed.

KW - surface roughness

KW - roughness meansurement

KW - sensor design

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M3 - Conference contribution

SN - 9780819413840

VL - 2101

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 348

EP - 351

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - SPIE

T2 - 2nd International Symposium on Measurement Technology and Intelligent Instruments

Y2 - 29 October 1993 through 5 November 1993

ER -

Design of a surface-roughness measuring sensor with high accuracy and wide dynamic range

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