Deterministic fabrication of surface micro-step features using a facet diamond cutting tool

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a facet diamond cutting tool was specially designed and used to generate near-right-angle shape structures with mirror surface finish on both sides. A focused ion beam (FIB) was used to modify the tool cutting edge locally to improve its sharpness and straightness. The tool cutting performance was evaluated through a series of cutting trials on brass substrate under various cutting conditions, i.e. depths of cut (ranged from 5 μm to 20 μm ) and feedrate (ranged from 3 μm/rev to 20 μm/rev). A Taylor Hobson CCI 3000 was used to evaluate the form accuracy and surface roughness of the machined micro step features. The results show that the surface machined under the feed rate of 3 μm/rev have the best surface finish as compared with the surfaces machined under other tested feedrates. The cutting tool was futher used to generate two clydlindrical micro steps with step heights and widths being 20 × 20 μm and 15 × 15 μm respectively. Twelve micro steps of each design were continuously generated to reflect the repeatability of this method. The measurement results were analysed by MountainsMap with results showing that the designed micro step features were successfully generated on brass surface. The dimensional deviation ratio of step heights and widths are all less than 4.5%, which well demonstrated the fleasiblity of the proposed method on surface micro structuring.
Original languageEnglish
Title of host publicationProceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Subtitle of host publicationJune 4th-8th 2018, Venice, IT
EditorsOltmann Riemer, Enrico Savio, D. Billington, R. K. Leach, Dishi Phillips
Publishereuspen
Pages91-92
Number of pages2
ISBN (Print)9780995775121
Publication statusPublished - 5 Jun 2018
EventEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy
Duration: 4 Jun 20188 Jun 2018
https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

Conference

ConferenceEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition
Abbreviated titleEUSPEN
CountryItaly
CityVenice
Period4/06/188/06/18
Internet address

Fingerprint Dive into the research topics of 'Deterministic fabrication of surface micro-step features using a facet diamond cutting tool'. Together they form a unique fingerprint.

  • Cite this

    Tong, Z., Jiang, X., & Blunt, L. (2018). Deterministic fabrication of surface micro-step features using a facet diamond cutting tool. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN): June 4th-8th 2018, Venice, IT (pp. 91-92). euspen. https://www.euspen.eu/knowledge-base/ICE18256.pdf