Development of on-machine measurement for ultra-precision machining

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
EditorsD. Phillips
Publishereuspen
Pages73-74
Number of pages2
ISBN (Electronic)9780995775107
Publication statusPublished - 26 May 2017
Event17th International Conference of the European Society for Precision Engineering and Nanotechnology - Hannover Congress Centre, Hannover, Germany
Duration: 29 May 20172 Jun 2017
Conference number: 17
http://www.euspen.eu/events/17th-international-conference-exhibition/ (Link to Conference Website )

Conference

Conference17th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2017
CountryGermany
CityHannover
Period29/05/172/06/17
Internet address

Fingerprint

machining
Machining
Interferometers
interferometers
manufacturing
Diamond
Surface measurement
Measurement errors
Diamonds
correlation coefficients
Trajectories
diamonds
alignment
trajectories
cycles
probes
shift

Cite this

Li, D., Jiang, X., Blunt, L., Tong, Z., Williamson, J., & Young, C. (2017). Development of on-machine measurement for ultra-precision machining. In D. Phillips (Ed.), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 (pp. 73-74). euspen.
Li, Duo ; Jiang, Xiangqian ; Blunt, Liam ; Tong, Zhen ; Williamson, James ; Young, Christian. / Development of on-machine measurement for ultra-precision machining. Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. editor / D. Phillips. euspen, 2017. pp. 73-74
@inproceedings{a1a910c383964fd7badcc3d8f33b0d8d,
title = "Development of on-machine measurement for ultra-precision machining",
abstract = "Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10{\%} and correlation coefficient is 0.991.",
keywords = "Interferometry, Non-contact, On-machine measurement, Ultra-precision diamond machining",
author = "Duo Li and Xiangqian Jiang and Liam Blunt and Zhen Tong and James Williamson and Christian Young",
year = "2017",
month = "5",
day = "26",
language = "English",
pages = "73--74",
editor = "D. Phillips",
booktitle = "Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017",
publisher = "euspen",

}

Li, D, Jiang, X, Blunt, L, Tong, Z, Williamson, J & Young, C 2017, Development of on-machine measurement for ultra-precision machining. in D Phillips (ed.), Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. euspen, pp. 73-74, 17th International Conference of the European Society for Precision Engineering and Nanotechnology, Hannover, Germany, 29/05/17.

Development of on-machine measurement for ultra-precision machining. / Li, Duo; Jiang, Xiangqian; Blunt, Liam; Tong, Zhen; Williamson, James; Young, Christian.

Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Phillips. euspen, 2017. p. 73-74.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Development of on-machine measurement for ultra-precision machining

AU - Li, Duo

AU - Jiang, Xiangqian

AU - Blunt, Liam

AU - Tong, Zhen

AU - Williamson, James

AU - Young, Christian

PY - 2017/5/26

Y1 - 2017/5/26

N2 - Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.

AB - Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.

KW - Interferometry

KW - Non-contact

KW - On-machine measurement

KW - Ultra-precision diamond machining

UR - http://www.scopus.com/inward/record.url?scp=85041287599&partnerID=8YFLogxK

UR - https://www.tib.eu/en/search/id/TIBKAT%3A889783012/Proceedings-of-the-17th-International-Conference/

M3 - Conference contribution

SP - 73

EP - 74

BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

A2 - Phillips, D.

PB - euspen

ER -

Li D, Jiang X, Blunt L, Tong Z, Williamson J, Young C. Development of on-machine measurement for ultra-precision machining. In Phillips D, editor, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. euspen. 2017. p. 73-74