Abstract
Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
| Editors | D. Phillips |
| Publisher | euspen |
| Pages | 73-74 |
| Number of pages | 2 |
| ISBN (Electronic) | 9780995775107 |
| Publication status | Published - 26 May 2017 |
| Event | 17th International Conference of the European Society for Precision Engineering and Nanotechnology - Hannover Congress Centre, Hannover, Germany Duration: 29 May 2017 → 2 Jun 2017 Conference number: 17 http://www.euspen.eu/events/17th-international-conference-exhibition/ (Link to Conference Website ) |
Conference
| Conference | 17th International Conference of the European Society for Precision Engineering and Nanotechnology |
|---|---|
| Abbreviated title | EUSPEN 2017 |
| Country | Germany |
| City | Hannover |
| Period | 29/05/17 → 2/06/17 |
| Internet address |
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Development of on-machine measurement for ultra-precision machining. / Li, Duo; Jiang, Xiangqian; Blunt, Liam; Tong, Zhen; Williamson, James; Young, Christian.
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. ed. / D. Phillips. euspen, 2017. p. 73-74.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Development of on-machine measurement for ultra-precision machining
AU - Li, Duo
AU - Jiang, Xiangqian
AU - Blunt, Liam
AU - Tong, Zhen
AU - Williamson, James
AU - Young, Christian
PY - 2017/5/26
Y1 - 2017/5/26
N2 - Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.
AB - Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.
KW - Interferometry
KW - Non-contact
KW - On-machine measurement
KW - Ultra-precision diamond machining
UR - http://www.scopus.com/inward/record.url?scp=85041287599&partnerID=8YFLogxK
UR - https://www.tib.eu/en/search/id/TIBKAT%3A889783012/Proceedings-of-the-17th-International-Conference/
M3 - Conference contribution
AN - SCOPUS:85041287599
SP - 73
EP - 74
BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
A2 - Phillips, D.
PB - euspen
ER -