Development of on-machine measurement for ultra-precision machining

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Surface measurement is playing an increasingly important role in ultra-precision manufacturing. Nowadays, there is a technological shift from offline measurement to on-machine measurement, forming a closed-loop control for manufacturing processes. Conventionally, the transportation operations between the measurement and machine coordinates are time-consuming and inevitably induce more errors, which cannot be neglected, especially at the ultra-precision level. Development of on-machine measurement for ultra-precision machining processes will enable the reduction of measurement cycle time as well as potential improvement of machining accuracy. In the present study, an in-house designed interferometer probe, called Dispersed Reference Interferometer (DRI) is integrated on an ultra-precision diamond turning machine (Precitech Nanoform 250). The alignment method of DRI is firstly described, in order to establish the measurement coordinate. Different on-machine measurement strategies are also discussed, including multiple radial, multiple circular, and spiral trajectories. Experimental study has shown that the on-machine measurement results of a cosine form sample agree well with the offline measurement. The measurement error difference is less than 10% and correlation coefficient is 0.991.

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
EditorsD. Phillips
Publishereuspen
Pages73-74
Number of pages2
ISBN (Electronic)9780995775107
Publication statusPublished - 26 May 2017
Event17th International Conference of the European Society for Precision Engineering and Nanotechnology - Hannover Congress Centre, Hannover, Germany
Duration: 29 May 20172 Jun 2017
Conference number: 17
http://www.euspen.eu/events/17th-international-conference-exhibition/ (Link to Conference Website )

Conference

Conference17th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2017
CountryGermany
CityHannover
Period29/05/172/06/17
Internet address

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