Development of "softgauges" for surface profile metrology

L. Blunt, R. K Leach, J. Jiang, P. Scott, P. M. Harris, S. J. Xiao, T. Li, G. Parkin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents work carried out as part of the UK National Measurement System Length Programme to produce "softgauges" for calibrating the software aspects of surface measuring systems and testing the numerical correctness of such software. The paper will discuss a framework for the softgauges, and the form of the reference data (Type F1 softgauges) and reference software (Type F2 softgauges) developed.
Original languageEnglish
Title of host publicationProceedings of the 5th International Conference of the European Society for Precision Engineering and nanotechnology
EditorsF. Chevrier, T. Taliercio, P. Falgayrettes, P. Gall-Borrut
Publishereuspen
Pages177-180
Number of pages4
Volume1
ISBN (Print) 9299003505
Publication statusPublished - 2005
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology - Montpellier, France
Duration: 8 May 200511 May 2005
Conference number: 5

Conference

Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2005
CountryFrance
CityMontpellier
Period8/05/0511/05/05

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Blunt, L., Leach, R. K., Jiang, J., Scott, P., Harris, P. M., Xiao, S. J., ... Parkin, G. (2005). Development of "softgauges" for surface profile metrology. In F. Chevrier, T. Taliercio, P. Falgayrettes, & P. Gall-Borrut (Eds.), Proceedings of the 5th International Conference of the European Society for Precision Engineering and nanotechnology (Vol. 1, pp. 177-180). euspen.