Development of Swinging Part Profilometer for Optics

Peng Zhang, Jie Li, Guoyu Yu, David Walker

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)


A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
Original languageEnglish
Title of host publicationOptics and Measurement International Conference 2016
EditorsJana Kovacicinova
Number of pages8
ISBN (Electronic)9781510607545
ISBN (Print)9781510607538
Publication statusPublished - 11 Nov 2016
EventOptics and Measurement 2016 International Conference - Grand Hotel Imperial, Liberec, Czech Republic
Duration: 11 Oct 201614 Oct 2016
Conference number: 3 (Link to Conference Details )

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceOptics and Measurement 2016 International Conference
Abbreviated titleOaM
Country/TerritoryCzech Republic
Internet address


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