Abstract
A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
| Original language | English |
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| Title of host publication | Optics and Measurement International Conference 2016 |
| Editors | Jana Kovacicinova |
| Publisher | SPIE |
| Number of pages | 8 |
| Volume | 10151 |
| ISBN (Electronic) | 9781510607545 |
| ISBN (Print) | 9781510607538 |
| DOIs | |
| Publication status | Published - 11 Nov 2016 |
| Event | Optics and Measurement 2016 International Conference - Grand Hotel Imperial, Liberec, Czech Republic Duration: 11 Oct 2016 → 14 Oct 2016 Conference number: 3 http://www.ipp.cas.cz/miranda2/export/sitesavcr/ufp/sys/galerie-download/Optics-and-Measurement-2016.pdf (Link to Conference Details ) |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 10151 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
Conference
| Conference | Optics and Measurement 2016 International Conference |
|---|---|
| Abbreviated title | OaM |
| Country/Territory | Czech Republic |
| City | Liberec |
| Period | 11/10/16 → 14/10/16 |
| Internet address |
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