Development of Swinging Part Profilometer for Optics

Peng Zhang, Jie Li, Guoyu Yu, David Walker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
Original languageEnglish
Title of host publicationOptics and Measurement International Conference 2016
EditorsJana Kovacicinova
PublisherSPIE
Number of pages8
Volume10151
ISBN (Electronic)9781510607545
ISBN (Print)9781510607538
DOIs
Publication statusPublished - 11 Nov 2016
EventOptics and Measurement 2016 International Conference - Grand Hotel Imperial, Liberec, Czech Republic
Duration: 11 Oct 201614 Oct 2016
Conference number: 3
http://www.ipp.cas.cz/miranda2/export/sitesavcr/ufp/sys/galerie-download/Optics-and-Measurement-2016.pdf (Link to Conference Details )

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume10151
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptics and Measurement 2016 International Conference
Abbreviated titleOaM
CountryCzech Republic
CityLiberec
Period11/10/1614/10/16
Internet address

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Cite this

Zhang, P., Li, J., Yu, G., & Walker, D. (2016). Development of Swinging Part Profilometer for Optics. In J. Kovacicinova (Ed.), Optics and Measurement International Conference 2016 (Vol. 10151). [101510B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10151). SPIE. https://doi.org/10.1117/12.2256295