Development of swinging part profilometer for optics

Peng Zhang, Jie Li, Guoyu Yu, David Walker

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
Original languageEnglish
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume10151
Early online date11 Nov 2016
Publication statusPublished - 12 Jan 2017
EventOptics and Measurement International Conference 2016 - Grand Hotel Imperial, Liberec, Czech Republic
Duration: 11 Oct 201614 Oct 2016
Conference number: 3
http://www.ipp.cas.cz/miranda2/export/sitesavcr/ufp/sys/galerie-download/Optics-and-Measurement-2016.pdf (Link to Conference Details )

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profilometers
Optics
Probe
optics
Metrology
robots
metrology
probes
hardware
Robot
In Situ Measurements
Surface Reconstruction
Hardware Design
Robots
in situ measurement
Data Acquisition
Hardware
data acquisition
Surface reconstruction
Time Scales

Cite this

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title = "Development of swinging part profilometer for optics",
abstract = "A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.",
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journal = "Proceedings of SPIE - The International Society for Optical Engineering",
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Development of swinging part profilometer for optics. / Zhang, Peng; Li, Jie; Yu, Guoyu; Walker, David.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 10151, 12.01.2017.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Development of swinging part profilometer for optics

AU - Zhang, Peng

AU - Li, Jie

AU - Yu, Guoyu

AU - Walker, David

PY - 2017/1/12

Y1 - 2017/1/12

N2 - A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

AB - A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

M3 - Conference article

VL - 10151

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -