Development of swinging part profilometer for optics

Peng Zhang, Jie Li, Guoyu Yu, David Walker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationDevelopment of swinging part profilometer for optics
EditorsPeng Zhang, Jie Li, Guoyu Yu, David D. Walker
PublisherSPIE
Number of pages9
Volume10151
Publication statusPublished - 12 Jan 2017
EventOptics and Measurement International Conference 2016 - Grand Hotel Imperial, Liberec, Czech Republic
Duration: 11 Oct 201614 Oct 2016
Conference number: 3
http://www.ipp.cas.cz/miranda2/export/sitesavcr/ufp/sys/galerie-download/Optics-and-Measurement-2016.pdf (Link to Conference Details )

Conference

ConferenceOptics and Measurement International Conference 2016
Abbreviated titleOaM
CountryCzech Republic
CityLiberec
Period11/10/1614/10/16
Internet address

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profilometers
optics
robots
metrology
probes
hardware
in situ measurement
data acquisition
computer programs
cycles

Cite this

Zhang, P., Li, J., Yu, G., & Walker, D. (2017). Development of swinging part profilometer for optics. In P. Zhang, J. Li, G. Yu, & D. D. Walker (Eds.), Proceedings of SPIE: Development of swinging part profilometer for optics (Vol. 10151). SPIE.
Zhang, Peng ; Li, Jie ; Yu, Guoyu ; Walker, David. / Development of swinging part profilometer for optics. Proceedings of SPIE: Development of swinging part profilometer for optics. editor / Peng Zhang ; Jie Li ; Guoyu Yu ; David D. Walker. Vol. 10151 SPIE, 2017.
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abstract = "A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.",
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Zhang, P, Li, J, Yu, G & Walker, D 2017, Development of swinging part profilometer for optics. in P Zhang, J Li, G Yu & DD Walker (eds), Proceedings of SPIE: Development of swinging part profilometer for optics. vol. 10151, SPIE, Optics and Measurement International Conference 2016, Liberec, Czech Republic, 11/10/16.

Development of swinging part profilometer for optics. / Zhang, Peng; Li, Jie; Yu, Guoyu; Walker, David.

Proceedings of SPIE: Development of swinging part profilometer for optics. ed. / Peng Zhang; Jie Li; Guoyu Yu; David D. Walker. Vol. 10151 SPIE, 2017.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Development of swinging part profilometer for optics

AU - Zhang, Peng

AU - Li, Jie

AU - Yu, Guoyu

AU - Walker, David

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N2 - A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

AB - A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

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Zhang P, Li J, Yu G, Walker D. Development of swinging part profilometer for optics. In Zhang P, Li J, Yu G, Walker DD, editors, Proceedings of SPIE: Development of swinging part profilometer for optics. Vol. 10151. SPIE. 2017