Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis

Nicola Senin, Liam A. Blunt, Martin Tolley

Research output: Contribution to journalArticle

13 Citations (Scopus)


A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.

Original languageEnglish
Pages (from-to)1819-1832
Number of pages14
JournalProceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Issue number11
Early online date9 Oct 2012
Publication statusPublished - 1 Nov 2012


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