Abstract
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 1819-1832 |
| Number of pages | 14 |
| Journal | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture |
| Volume | 226 |
| Issue number | 11 |
| Early online date | 9 Oct 2012 |
| DOIs | |
| Publication status | Published - 1 Nov 2012 |