Dislocation tomography made easy: A reconstruction from ADF STEM images obtained using automated image shift correction

J. H. Sharp, J. S. Barnard, K. Kaneko, K. Higashida, P. A. Midgley

Research output: Contribution to journalConference articlepeer-review

37 Citations (Scopus)


After previous work producing a successful 3D tomographic reconstruction of dislocations in GaN from conventional weak-beam dark-field (WBDF) images, we have reconstructed a cascade of dislocations in deformed and annealed silicon to a comparable standard using the more experimentally straightforward technique of STEM annular dark-field imaging (STEM ADF). In this mode, image contrast was much more consistent over the specimen tilt range than in conventional weak-beam dark-field imaging. Automatic acquisition software could thus restore the correct dislocation array to the field of view at each tilt angle, though manual focusing was still required. Reconstruction was carried out by sequential iterative reconstruction technique using FEI's Inspect3D software. Dislocations were distributed non-uniformly along cascades, with sparse areas between denser clumps in which individual dislocations of in-plane image width 24 nm could be distinguished in images and reconstruction. Denser areas showed more complicated stacking-fault contrast, hampering tomographic reconstruction. The general three-dimensional form of the denser areas was reproduced well, showing the dislocation array to be planar and not parallel to the foil surfaces.

Original languageEnglish
Article number012013
Number of pages4
JournalJournal of Physics: Conference Series
Early online date25 Sep 2008
Publication statusPublished - 25 Sep 2008
Externally publishedYes
Event2007 Electron Microscopy and Analysis Group Conference - Glasgow Caledonian University, Glasgow, United Kingdom
Duration: 3 Sep 20077 Sep 2007
http://www.iop.org/activity/groups/subject/emag/ (Link to Electron Microscopy and Analysis Group Website)


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