Dispersed Reference Interferometry

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.

LanguageEnglish
Pages551-554
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume62
Issue number1
DOIs
Publication statusPublished - 24 Apr 2013

Fingerprint

Interferometry
Interferometers
interferometry
interferometers
Chromatic dispersion
Thickness measurement
Surface topography
linearity
Film thickness
Spectrometers
Optics
topography
film thickness
diffraction patterns
gratings
optics
spectrometers

Cite this

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abstract = "Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.",
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Dispersed Reference Interferometry. / Jiang, Xiangqian; Martin, Haydn.

In: CIRP Annals - Manufacturing Technology, Vol. 62, No. 1, 24.04.2013, p. 551-554.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Dispersed Reference Interferometry

AU - Jiang, Xiangqian

AU - Martin, Haydn

PY - 2013/4/24

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AB - Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.

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KW - Measuring Instrument

KW - Surface

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