Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

E. Hourdakis, A. G. Nassiopoulou, A. Parisini, M. A. Reading, J. A. Van Den Berg, L. Sygellou, S. Ladas, P. Petrik, A. Nutsch, M. Wolf, G. Roeder

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemistry