Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

E. Hourdakis, A. G. Nassiopoulou, A. Parisini, M. A. Reading, J. A. Van Den Berg, L. Sygellou, S. Ladas, P. Petrik, A. Nutsch, M. Wolf, G. Roeder

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