Embedded optical fiber link interferometer sensors for snapshot surface inspection using the synthetic wavelength technique

Mothana A. Hassan, Basman M. Al-Nedawe, Makram A. Fakhri

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Free-space optical measurement systems can have a direct impact on evaluation systems operational in propagation paths. During propagation via optical fibers, light suffers scattering or interference, causing some output signal loss with an uncertainty outcome. Therefore, this study aims to explore the instant decisions related to the use of single- and multi-mode fiber optics and how they affect the gathering of data from high-speed optical measurement instrument links. The study also seeks to address a number of design methodology aspects and the empirical outcomes related to a surface topography measurement sensor based on fiber optics capable of surface roughness or step-height measurement. The study suggests that the Fourier transform profilometry method (FTP) can overcome the disadvantages of optical metrology sensors (e.g., bulkiness, challenging set-up, high costs, and low speed). However, despite eliminating vertical height problems, the Fourier transform profilometry (FTP) did have some shortcomings for every outcome related to core variables, including the dispersive optical fiber link sensor. The synthetic wavelength method enabled the dispersive optical fiber link sensor to calculate the vertical step height of the selected sample (1 µm). There was improved step-height repeatability, with satisfactory from 20 to 18 nm outcome improvement range. Additional investigations are necessary to establish the compatibility of single- or multi-mode optical fiber sensors with particular instruments, especially those currently preferred for embedded metrology applications.

Original languageEnglish
Article number417370
Pages (from-to)2339-2347
Number of pages9
JournalApplied Optics
Volume60
Issue number8
Early online date19 Feb 2021
DOIs
Publication statusPublished - 10 Mar 2021
Externally publishedYes

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