Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis

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3 Citations (Scopus)

Abstract

This paper represents a novel analysis method to improve the measurement accuracy of an optical stereo deflectometry system. A novel imaging model is proposed to research the relation between the phase uncertainty and the normal uncertainty of a stereo deflectometry system. By comprehensively considering the influence on the sampling phase error and the normal error, the system's screen pixel size and the period of fringe displayed on the screen are analyzed to enhance the measurement accuracy. To verify the proposed method, experiments using a common LCD (liquid crystal display) monitor and a screen with Retina Display have been investigated respectively. Experimental results demonstrate using the screen with Retina Display can significantly improve the measurement accuracy of a stereo deflectometry 2.38 times in accuracy due to the ultra-fine pixel size. A stereo deflectometry system based on the proposed method has been built to measure a standard flat mirror and a standard concave mirror. The global measurement accuracy of the flat mirror and the concave mirror can reach 69.7 nm and 96.8 nm respectively.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalOptics and Lasers in Engineering
Volume111
Early online date29 Jul 2018
DOIs
Publication statusPublished - 1 Dec 2018

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Mirrors
Imaging techniques
augmentation
Display devices
mirrors
retina
Pixels
pixels
Liquid crystal displays
phase error
monitors
Sampling
sampling
liquid crystals
Experiments
Uncertainty

Cite this

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title = "Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis",
abstract = "This paper represents a novel analysis method to improve the measurement accuracy of an optical stereo deflectometry system. A novel imaging model is proposed to research the relation between the phase uncertainty and the normal uncertainty of a stereo deflectometry system. By comprehensively considering the influence on the sampling phase error and the normal error, the system's screen pixel size and the period of fringe displayed on the screen are analyzed to enhance the measurement accuracy. To verify the proposed method, experiments using a common LCD (liquid crystal display) monitor and a screen with Retina Display have been investigated respectively. Experimental results demonstrate using the screen with Retina Display can significantly improve the measurement accuracy of a stereo deflectometry 2.38 times in accuracy due to the ultra-fine pixel size. A stereo deflectometry system based on the proposed method has been built to measure a standard flat mirror and a standard concave mirror. The global measurement accuracy of the flat mirror and the concave mirror can reach 69.7 nm and 96.8 nm respectively.",
keywords = "Error analysis, Optical metrology, Performance evaluation, Stereo deflectometry, Three-dimensional shape measurement",
author = "Yongjia Xu and Feng Gao and Xiangqian Jiang",
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N2 - This paper represents a novel analysis method to improve the measurement accuracy of an optical stereo deflectometry system. A novel imaging model is proposed to research the relation between the phase uncertainty and the normal uncertainty of a stereo deflectometry system. By comprehensively considering the influence on the sampling phase error and the normal error, the system's screen pixel size and the period of fringe displayed on the screen are analyzed to enhance the measurement accuracy. To verify the proposed method, experiments using a common LCD (liquid crystal display) monitor and a screen with Retina Display have been investigated respectively. Experimental results demonstrate using the screen with Retina Display can significantly improve the measurement accuracy of a stereo deflectometry 2.38 times in accuracy due to the ultra-fine pixel size. A stereo deflectometry system based on the proposed method has been built to measure a standard flat mirror and a standard concave mirror. The global measurement accuracy of the flat mirror and the concave mirror can reach 69.7 nm and 96.8 nm respectively.

AB - This paper represents a novel analysis method to improve the measurement accuracy of an optical stereo deflectometry system. A novel imaging model is proposed to research the relation between the phase uncertainty and the normal uncertainty of a stereo deflectometry system. By comprehensively considering the influence on the sampling phase error and the normal error, the system's screen pixel size and the period of fringe displayed on the screen are analyzed to enhance the measurement accuracy. To verify the proposed method, experiments using a common LCD (liquid crystal display) monitor and a screen with Retina Display have been investigated respectively. Experimental results demonstrate using the screen with Retina Display can significantly improve the measurement accuracy of a stereo deflectometry 2.38 times in accuracy due to the ultra-fine pixel size. A stereo deflectometry system based on the proposed method has been built to measure a standard flat mirror and a standard concave mirror. The global measurement accuracy of the flat mirror and the concave mirror can reach 69.7 nm and 96.8 nm respectively.

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