Enhancing Ellipsometry Analysis with Whale Optimisation: A Novel Approach for Precise Material Characterisation

To address the challenges associated with initial point selection and to enhance the speed of analysis in ellipsometry data interpretation, this study introduces a novel algorithm based on whale optimisation. The algorithm is designed to accurately determine samples' thickness and refractive index across transparent wavelength ranges. Comparative analysis demonstrates that the Psi and Delta spectra generated by the proposed algorithm align more closely with those obtained through the traditional transfer matrix method (TMM), underscoring the algorithm's improved accuracy. Furthermore, the algorithm's efficacy is validated by the excellent agreement between the properties of the established sample model (thickness and refractive index) and those acquired by transfer matrix data. This validation confirms the utility of the proposed algorithm in fitting ellipsometry data, establishing it as a robust tool for extracting essential fitting parameters of samples with enhanced precision and efficiency.