Evaluation of measurement technique for a precision aspheric artefact using a nano-measuring machine

Xiaomei Chen, Andrew Longstaff, Simon Fletcher, Alan Myers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A precision aspheric artefact is measured in 3D by a commercially available nano-measuring machine (NMM) integrated with a contact inductive sensor as the probe. The mathematics of 3D compensation of the error caused by the probe radius is derived. The influence of the probe radius measurement uncertainty on the compensation errors for the 3D measurements is discussed. If the calibration uncertainty of probe radius is 1m and 0.1 μm respectively, the compensation errors for a paraboloid artefact are within 100 nm and 10 nm respectively, and the artefact measurement uncertainties are 103 nm and 26 nm respectively. The artefact calibration uncertainty depends more on the uncertainty of the probe radius calibration than the probe radius.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance X
Subtitle of host publication10th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2013
EditorsLiam Blunt
Publishereuspen
Pages351-358
Number of pages8
ISBN (Print)9780956679017
Publication statusPublished - 2013
Event10th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - Buckinghamshire, United Kingdom
Duration: 20 Mar 201321 Mar 2013
Conference number: 10

Conference

Conference10th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance
Abbreviated titleLAMDAMAP 2013
CountryUnited Kingdom
CityBuckinghamshire
Period20/03/1321/03/13

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  • Cite this

    Chen, X., Longstaff, A., Fletcher, S., & Myers, A. (2013). Evaluation of measurement technique for a precision aspheric artefact using a nano-measuring machine. In L. Blunt (Ed.), Laser Metrology and Machine Performance X : 10th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2013 (pp. 351-358). euspen.