Abstract
A precision aspheric artefact is measured in 3D by a commercially available nano-measuring machine (NMM) integrated with a contact inductive sensor as the probe. The mathematics of 3D compensation of the error caused by the probe radius is derived. The influence of the probe radius measurement uncertainty on the compensation errors for the 3D measurements is discussed. If the calibration uncertainty of probe radius is 1m and 0.1 μm respectively, the compensation errors for a paraboloid artefact are within 100 nm and 10 nm respectively, and the artefact measurement uncertainties are 103 nm and 26 nm respectively. The artefact calibration uncertainty depends more on the uncertainty of the probe radius calibration than the probe radius.
Original language | English |
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Title of host publication | Laser Metrology and Machine Performance X |
Subtitle of host publication | 10th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2013 |
Editors | Liam Blunt |
Publisher | euspen |
Pages | 351-358 |
Number of pages | 8 |
ISBN (Print) | 9780956679017 |
Publication status | Published - 2013 |
Event | 10th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance - Buckinghamshire, United Kingdom Duration: 20 Mar 2013 → 21 Mar 2013 Conference number: 10 |
Conference
Conference | 10th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance |
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Abbreviated title | LAMDAMAP 2013 |
Country/Territory | United Kingdom |
City | Buckinghamshire |
Period | 20/03/13 → 21/03/13 |