Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet

Wenlong Lu, Nengguo Yu, Xinglong Zou, Xiaojun Liu, Liping Zhou, Tukun Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.

Original languageEnglish
Title of host publication13th CIRP Conference on Computer Aided Tolerancing
PublisherElsevier
Pages298-302
Number of pages5
Volume27
ISBN (Electronic)9781510803015
DOIs
Publication statusPublished - 2015
Event13th CIRP Conference on Computer Aided Tolerancing - Hangzhou, China
Duration: 11 May 201414 May 2014
Conference number: 13

Conference

Conference13th CIRP Conference on Computer Aided Tolerancing
Abbreviated titleCAT 2014
CountryChina
CityHangzhou
Period11/05/1414/05/14

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Cite this

Lu, W., Yu, N., Zou, X., Liu, X., Zhou, L., & Li, T. (2015). Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet. In 13th CIRP Conference on Computer Aided Tolerancing (Vol. 27, pp. 298-302). Elsevier. https://doi.org/10.1016/j.procir.2015.04.082
Lu, Wenlong ; Yu, Nengguo ; Zou, Xinglong ; Liu, Xiaojun ; Zhou, Liping ; Li, Tukun. / Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet. 13th CIRP Conference on Computer Aided Tolerancing. Vol. 27 Elsevier, 2015. pp. 298-302
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title = "Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet",
abstract = "Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.",
keywords = "Directional characteristic, Finite radon transform, Lifting wavelet, MEMS structure",
author = "Wenlong Lu and Nengguo Yu and Xinglong Zou and Xiaojun Liu and Liping Zhou and Tukun Li",
year = "2015",
doi = "10.1016/j.procir.2015.04.082",
language = "English",
volume = "27",
pages = "298--302",
booktitle = "13th CIRP Conference on Computer Aided Tolerancing",
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Lu, W, Yu, N, Zou, X, Liu, X, Zhou, L & Li, T 2015, Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet. in 13th CIRP Conference on Computer Aided Tolerancing. vol. 27, Elsevier, pp. 298-302, 13th CIRP Conference on Computer Aided Tolerancing, Hangzhou, China, 11/05/14. https://doi.org/10.1016/j.procir.2015.04.082

Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet. / Lu, Wenlong; Yu, Nengguo; Zou, Xinglong; Liu, Xiaojun; Zhou, Liping; Li, Tukun.

13th CIRP Conference on Computer Aided Tolerancing. Vol. 27 Elsevier, 2015. p. 298-302.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet

AU - Lu, Wenlong

AU - Yu, Nengguo

AU - Zou, Xinglong

AU - Liu, Xiaojun

AU - Zhou, Liping

AU - Li, Tukun

PY - 2015

Y1 - 2015

N2 - Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.

AB - Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.

KW - Directional characteristic

KW - Finite radon transform

KW - Lifting wavelet

KW - MEMS structure

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U2 - 10.1016/j.procir.2015.04.082

DO - 10.1016/j.procir.2015.04.082

M3 - Conference contribution

VL - 27

SP - 298

EP - 302

BT - 13th CIRP Conference on Computer Aided Tolerancing

PB - Elsevier

ER -

Lu W, Yu N, Zou X, Liu X, Zhou L, Li T. Evaluation of MEMS structures with directional characteristics based on FRAT and lifting wavelet. In 13th CIRP Conference on Computer Aided Tolerancing. Vol. 27. Elsevier. 2015. p. 298-302 https://doi.org/10.1016/j.procir.2015.04.082