Abstract
Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.
Original language | English |
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Title of host publication | 13th CIRP Conference on Computer Aided Tolerancing |
Publisher | Elsevier |
Pages | 298-302 |
Number of pages | 5 |
Volume | 27 |
ISBN (Electronic) | 9781510803015 |
DOIs | |
Publication status | Published - 2015 |
Event | 13th CIRP Conference on Computer Aided Tolerancing - Hangzhou, China Duration: 11 May 2014 → 14 May 2014 Conference number: 13 |
Conference
Conference | 13th CIRP Conference on Computer Aided Tolerancing |
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Abbreviated title | CAT 2014 |
Country/Territory | China |
City | Hangzhou |
Period | 11/05/14 → 14/05/14 |
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Tukun Li
- Department of Engineering - Research Fellow
- School of Computing and Engineering
- Centre for Precision Technologies - Member
Person: Academic