Extending the vertical range of wavelength scanning interferometry

Giuseppe Moschetti, Hussam Muhamedsalih, Xiangqian Jiang, Richard K. Leach, Daniel O'Connor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology
PublisherAmerican Society for Precision Engineering, ASPE
Pages50-55
Number of pages6
ISBN (Electronic)9781887706681
Publication statusPublished - 2015
Event5th ASPE Topical Meeting on Precision Interferometric Metrology - The Golden Hotel, Golden, United States
Duration: 8 Jul 201510 Jul 2015
https://www.osa.org/en-us/meetings/global_calendar/events/2015/5th_aspe_topical_meeting_on_precision_interferomet/ (Link to Conference Website )

Conference

Conference5th ASPE Topical Meeting on Precision Interferometric Metrology
CountryUnited States
CityGolden
Period8/07/1510/07/15
Internet address

Cite this

Moschetti, G., Muhamedsalih, H., Jiang, X., Leach, R. K., & O'Connor, D. (2015). Extending the vertical range of wavelength scanning interferometry. In Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology (pp. 50-55). American Society for Precision Engineering, ASPE.