Extending the vertical range of wavelength scanning interferometry

Giuseppe Moschetti; Hussam Muhamedsalih; Xiangqian Jiang; Richard K. Leach; Daniel O'Connor

Extending the vertical range of wavelength scanning interferometry

Giuseppe Moschetti, Hussam Muhamedsalih, Xiangqian Jiang, Richard K. Leach, Daniel O'Connor

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology
Publisher	American Society for Precision Engineering, ASPE
Pages	50-55
Number of pages	6
ISBN (Electronic)	9781887706681
Publication status	Published - 2015
Event	5th ASPE Topical Meeting on Precision Interferometric Metrology - The Golden Hotel, Golden, United States Duration: 8 Jul 2015 → 10 Jul 2015 https://www.osa.org/en-us/meetings/global_calendar/events/2015/5th_aspe_topical_meeting_on_precision_interferomet/ (Link to Conference Website )

Conference

Conference	5th ASPE Topical Meeting on Precision Interferometric Metrology
Country	United States
City	Golden
Period	8/07/15 → 10/07/15
Internet address	https://www.osa.org/en-us/meetings/global_calendar/events/2015/5th_aspe_topical_meeting_on_precision_interferomet/ (Link to Conference Website )

Access to Document

Link to publication in Scopus

Cite this

Moschetti, G., Muhamedsalih, H., Jiang, X., Leach, R. K., & O'Connor, D. (2015). Extending the vertical range of wavelength scanning interferometry. In Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology (pp. 50-55). American Society for Precision Engineering, ASPE.

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title = "Extending the vertical range of wavelength scanning interferometry",

author = "Giuseppe Moschetti and Hussam Muhamedsalih and Xiangqian Jiang and Leach, {Richard K.} and Daniel O'Connor",

year = "2015",

language = "English",

pages = "50--55",

booktitle = "Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology",

publisher = "American Society for Precision Engineering, ASPE",

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Moschetti, G, Muhamedsalih, H , Jiang, X, Leach, RK & O'Connor, D 2015, Extending the vertical range of wavelength scanning interferometry. in Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology. American Society for Precision Engineering, ASPE, pp. 50-55, 5th ASPE Topical Meeting on Precision Interferometric Metrology, Golden, United States, 8/07/15.

Extending the vertical range of wavelength scanning interferometry. / Moschetti, Giuseppe; Muhamedsalih, Hussam ; Jiang, Xiangqian; Leach, Richard K.; O'Connor, Daniel.

Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology. American Society for Precision Engineering, ASPE, 2015. p. 50-55.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Extending the vertical range of wavelength scanning interferometry

AU - Moschetti, Giuseppe

AU - Muhamedsalih, Hussam

AU - Jiang, Xiangqian

AU - Leach, Richard K.

AU - O'Connor, Daniel

PY - 2015

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M3 - Conference contribution

AN - SCOPUS:84940642411

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EP - 55

BT - Proceedings - ASPE 2015 Summer Topical Meeting: Precision Interferometric Metrology

PB - American Society for Precision Engineering, ASPE

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