Extreme ultraviolet laser ablation of solid targets

Gregory J. Tallents, Sarah A. Wilson, James Lolley, Valentin Aslanyan, Andrew West, Andrew K. Rossall, Edourdo Solis-Meza, Erik Wagenaars, Carmen S. Menoni, Jorge J. Rocca

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)


A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10 9Wcm -2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 10 Wcm -2 with a cylindrically symmetric focus.

Original languageEnglish
Title of host publicationX-Ray Lasers and Coherent X-Ray Sources
Subtitle of host publicationDevelopment and Applications XIII
EditorsAnnie Klisnick, Carmen S. Menoni
Number of pages7
ISBN (Electronic)9781510629165
ISBN (Print)9781510629158
Publication statusPublished - 9 Sep 2019
Externally publishedYes
EventSPIE Optical Engineering + Applications - San Diego Convention Center, San Diego, United States
Duration: 11 Aug 201915 Aug 2019
Conference number: 13

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSPIE Optical Engineering + Applications
Country/TerritoryUnited States
CitySan Diego


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