Extreme ultraviolet laser ablation of solid targets

Gregory J. Tallents; Sarah A. Wilson; James Lolley; Valentin Aslanyan; Andrew West; Andrew K. Rossall; Edourdo Solis-Meza; Erik Wagenaars; Carmen S. Menoni; Jorge J. Rocca

doi:10.1117/12.2528736

Extreme ultraviolet laser ablation of solid targets

Gregory J. Tallents, Sarah A. Wilson, James Lolley, Valentin Aslanyan, Andrew West, Andrew K. Rossall, Edourdo Solis-Meza, Erik Wagenaars, Carmen S. Menoni, Jorge J. Rocca

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10 ⁹Wcm ^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 ¹⁰ Wcm ^-2 with a cylindrically symmetric focus.

Original language	English
Title of host publication	X-Ray Lasers and Coherent X-Ray Sources
Subtitle of host publication	Development and Applications XIII
Editors	Annie Klisnick, Carmen S. Menoni
Publisher	SPIE
Number of pages	7
Volume	11111
ISBN (Electronic)	9781510629165
ISBN (Print)	9781510629158
DOIs	https://doi.org/10.1117/12.2528736
Publication status	Published - 9 Sept 2019
Externally published	Yes
Event	SPIE Optical Engineering + Applications - San Diego Convention Center, San Diego, United States Duration: 11 Aug 2019 → 15 Aug 2019 Conference number: 13

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	11111
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	SPIE Optical Engineering + Applications
Country/Territory	United States
City	San Diego
Period	11/08/19 → 15/08/19

Access to Document

10.1117/12.2528736Licence: Unspecified

Cite this

Tallents, G. J., Wilson, S. A., Lolley, J., Aslanyan, V., West, A., Rossall, A. K., Solis-Meza, E., Wagenaars, E., Menoni, C. S., & Rocca, J. J. (2019). Extreme ultraviolet laser ablation of solid targets. In A. Klisnick, & C. S. Menoni (Eds.), X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII (Vol. 11111). Article 1111106 (Proceedings of SPIE; Vol. 11111). SPIE. https://doi.org/10.1117/12.2528736

@inproceedings{2995f8e77bf64be8baf1141c728adf9e,

title = "Extreme ultraviolet laser ablation of solid targets",

abstract = "A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10 9Wcm -2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 10 Wcm -2 with a cylindrically symmetric focus. ",

keywords = "ablation, capillary, extreme ultra-violet, laser",

author = "Tallents, \{Gregory J.\} and Wilson, \{Sarah A.\} and James Lolley and Valentin Aslanyan and Andrew West and Rossall, \{Andrew K.\} and Edourdo Solis-Meza and Erik Wagenaars and Menoni, \{Carmen S.\} and Rocca, \{Jorge J.\}",

year = "2019",

month = sep,

day = "9",

doi = "10.1117/12.2528736",

language = "English",

isbn = "9781510629158",

volume = "11111",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "Annie Klisnick and Menoni, \{Carmen S.\}",

booktitle = "X-Ray Lasers and Coherent X-Ray Sources",

address = "United States",

note = "SPIE Optical Engineering + Applications ; Conference date: 11-08-2019 Through 15-08-2019",

}

Tallents, GJ, Wilson, SA, Lolley, J, Aslanyan, V, West, A, Rossall, AK, Solis-Meza, E, Wagenaars, E, Menoni, CS & Rocca, JJ 2019, Extreme ultraviolet laser ablation of solid targets. in A Klisnick & CS Menoni (eds), X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII. vol. 11111, 1111106, Proceedings of SPIE, vol. 11111, SPIE, SPIE Optical Engineering + Applications, San Diego, California, United States, 11/08/19. https://doi.org/10.1117/12.2528736

Extreme ultraviolet laser ablation of solid targets. / Tallents, Gregory J.; Wilson, Sarah A.; Lolley, James et al.
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII. ed. / Annie Klisnick; Carmen S. Menoni. Vol. 11111 SPIE, 2019. 1111106 (Proceedings of SPIE; Vol. 11111).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Extreme ultraviolet laser ablation of solid targets

AU - Tallents, Gregory J.

AU - Wilson, Sarah A.

AU - Lolley, James

AU - Aslanyan, Valentin

AU - West, Andrew

AU - Rossall, Andrew K.

AU - Solis-Meza, Edourdo

AU - Wagenaars, Erik

AU - Menoni, Carmen S.

AU - Rocca, Jorge J.

N1 - Conference code: 13

PY - 2019/9/9

Y1 - 2019/9/9

N2 - A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10 9Wcm -2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 10 Wcm -2 with a cylindrically symmetric focus.

AB - A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10 9Wcm -2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 10 Wcm -2 with a cylindrically symmetric focus.

KW - ablation

KW - capillary

KW - extreme ultra-violet

KW - laser

UR - https://www.scopus.com/pages/publications/85074201904

U2 - 10.1117/12.2528736

DO - 10.1117/12.2528736

M3 - Conference contribution

SN - 9781510629158

VL - 11111

T3 - Proceedings of SPIE

BT - X-Ray Lasers and Coherent X-Ray Sources

A2 - Klisnick, Annie

A2 - Menoni, Carmen S.

PB - SPIE

T2 - SPIE Optical Engineering + Applications

Y2 - 11 August 2019 through 15 August 2019

ER -

Extreme ultraviolet laser ablation of solid targets

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this