Fabrication of a zirconia MEMS-based microthruster by gel casting on PDMS soft molds

K. H. Cheah, P. S. Khiew, J. K. Chin

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

A zirconia microelectromechanical-system-based microthruster was fabricated through a newly developed fabrication route. Gel casting of homogenously dispersed zirconia suspension on polydimethylsiloxane soft mold was utilized to replicate the geometries of microthruster design onto a ceramic layer of about 1.2mm thick. Lamination of the patterned ceramic layer to another flat ceramic layer and subsequent sintering produced the microthruster. Characterizations on the fabricated prototype showed good shape retention on the replicated geometries and good quality of lamination. Shrinkage of about 10-15% was noted after sintering. The current fabrication route is particularly promising for the development of high-performance micropropulsion systems which require their structural material to survive in an extreme environment which is corrosive, of high temperature and highly oxidative.

Original languageEnglish
Article number095013
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number9
Early online date27 Jul 2012
DOIs
Publication statusPublished - 1 Sep 2012
Externally publishedYes

Fingerprint

Molds
Zirconia
MEMS
Casting
Sintering
Gels
Fabrication
Caustics
Geometry
Polydimethylsiloxane
Suspensions
Temperature
zirconium oxide
baysilon

Cite this

@article{aabf90b3776a43048efd9a88bf84d0d6,
title = "Fabrication of a zirconia MEMS-based microthruster by gel casting on PDMS soft molds",
abstract = "A zirconia microelectromechanical-system-based microthruster was fabricated through a newly developed fabrication route. Gel casting of homogenously dispersed zirconia suspension on polydimethylsiloxane soft mold was utilized to replicate the geometries of microthruster design onto a ceramic layer of about 1.2mm thick. Lamination of the patterned ceramic layer to another flat ceramic layer and subsequent sintering produced the microthruster. Characterizations on the fabricated prototype showed good shape retention on the replicated geometries and good quality of lamination. Shrinkage of about 10-15{\%} was noted after sintering. The current fabrication route is particularly promising for the development of high-performance micropropulsion systems which require their structural material to survive in an extreme environment which is corrosive, of high temperature and highly oxidative.",
author = "Cheah, {K. H.} and Khiew, {P. S.} and Chin, {J. K.}",
year = "2012",
month = "9",
day = "1",
doi = "10.1088/0960-1317/22/9/095013",
language = "English",
volume = "22",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "9",

}

Fabrication of a zirconia MEMS-based microthruster by gel casting on PDMS soft molds. / Cheah, K. H.; Khiew, P. S.; Chin, J. K.

In: Journal of Micromechanics and Microengineering, Vol. 22, No. 9, 095013, 01.09.2012.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication of a zirconia MEMS-based microthruster by gel casting on PDMS soft molds

AU - Cheah, K. H.

AU - Khiew, P. S.

AU - Chin, J. K.

PY - 2012/9/1

Y1 - 2012/9/1

N2 - A zirconia microelectromechanical-system-based microthruster was fabricated through a newly developed fabrication route. Gel casting of homogenously dispersed zirconia suspension on polydimethylsiloxane soft mold was utilized to replicate the geometries of microthruster design onto a ceramic layer of about 1.2mm thick. Lamination of the patterned ceramic layer to another flat ceramic layer and subsequent sintering produced the microthruster. Characterizations on the fabricated prototype showed good shape retention on the replicated geometries and good quality of lamination. Shrinkage of about 10-15% was noted after sintering. The current fabrication route is particularly promising for the development of high-performance micropropulsion systems which require their structural material to survive in an extreme environment which is corrosive, of high temperature and highly oxidative.

AB - A zirconia microelectromechanical-system-based microthruster was fabricated through a newly developed fabrication route. Gel casting of homogenously dispersed zirconia suspension on polydimethylsiloxane soft mold was utilized to replicate the geometries of microthruster design onto a ceramic layer of about 1.2mm thick. Lamination of the patterned ceramic layer to another flat ceramic layer and subsequent sintering produced the microthruster. Characterizations on the fabricated prototype showed good shape retention on the replicated geometries and good quality of lamination. Shrinkage of about 10-15% was noted after sintering. The current fabrication route is particularly promising for the development of high-performance micropropulsion systems which require their structural material to survive in an extreme environment which is corrosive, of high temperature and highly oxidative.

UR - http://www.scopus.com/inward/record.url?scp=84866340469&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/22/9/095013

DO - 10.1088/0960-1317/22/9/095013

M3 - Article

VL - 22

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 9

M1 - 095013

ER -