Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films

P. Normand, K. Beltsios, E. Kapetanakis, D. Tsoukalas, T. Travlos, J. Stoemenos, J. Van Den Berg, S. Zhang, C. Vieu, H. Launois, J. Gautier, F. Jourdan, L. Palun

Research output: Contribution to journal › Conference article › peer-review

34 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy