Formation of 2-D arrays of silicon nanocrystals in thin siO2 films by very-low energy Si+ ion implantation

P. Normand, D. Tsoukalas, E. Kapetanakis, J. A. Van Den Berg, D. G. Armour, J. Stoemenos, C. Vieu

Research output: Contribution to journalArticle

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Abstract

Two-dimensional (2-D) arrays of silicon nanocrystals were fabricated in thermally grown SiO2 films by 1 keV 28Si+ ion implantation and subsequent thermal annealing. The nanocrystals characteristics (size, shape, and spatial distribution) as a function of the implanted dose and annealing conditions were investigated by transmission electron microscopy. The nanocrystals were located at a tunneling distance from the oxide surface. With increasing size, the nanocrystals changed from quasi-spheres to faceted platelets. With a reduction in the implantation dose and the annealing temperature, the size of the nanocrystals decreased, their size distribution became more narrow, while their spatial arrangement remained 2-D.

Original languageEnglish
Pages (from-to)88-90
Number of pages3
JournalElectrochemical and Solid-State Letters
Volume1
Issue number2
Early online date11 Jun 1998
DOIs
Publication statusPublished - Aug 1998
Externally publishedYes

Fingerprint

Silicon
Ion implantation
Nanocrystals
ion implantation
nanocrystals
Thin films
silicon
thin films
Annealing
annealing
energy
dosage
Platelets
platelets
Oxides
Spatial distribution
implantation
spatial distribution
Transmission electron microscopy
transmission electron microscopy

Cite this

Normand, P. ; Tsoukalas, D. ; Kapetanakis, E. ; Van Den Berg, J. A. ; Armour, D. G. ; Stoemenos, J. ; Vieu, C. / Formation of 2-D arrays of silicon nanocrystals in thin siO2 films by very-low energy Si+ ion implantation. In: Electrochemical and Solid-State Letters. 1998 ; Vol. 1, No. 2. pp. 88-90.
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Formation of 2-D arrays of silicon nanocrystals in thin siO2 films by very-low energy Si+ ion implantation. / Normand, P.; Tsoukalas, D.; Kapetanakis, E.; Van Den Berg, J. A.; Armour, D. G.; Stoemenos, J.; Vieu, C.

In: Electrochemical and Solid-State Letters, Vol. 1, No. 2, 08.1998, p. 88-90.

Research output: Contribution to journalArticle

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