Formation of 2-D arrays of silicon nanocrystals in thin siO2 films by very-low energy Si+ ion implantation

P. Normand, D. Tsoukalas, E. Kapetanakis, J. A. Van Den Berg, D. G. Armour, J. Stoemenos, C. Vieu

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

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