Formation of neon induced cavities in silicon by plasma based ion implantation

S. Peripolli, L. Amaral, E. Oliviero, M. L. David, M. F. Beaufort, J. F. Barbot, L. Pichon, M. Drouet, P. F.P. Fichtner, S. E. Donnelly

Research output: Contribution to journal › Article › peer-review