Formation of neon induced cavities in silicon by plasma based ion implantation

S. Peripolli, L. Amaral, E. Oliviero, M. L. David, M. F. Beaufort, J. F. Barbot, L. Pichon, M. Drouet, P. F.P. Fichtner, S. E. Donnelly

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Formation of neon induced cavities in silicon by plasma based ion implantation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy