Formation of porous structures on Si surface by LASER-assisted etching

Engineering & Materials Science

• Etching 100%
• Lasers 46%
• Porous silicon 46%
• Drug Discovery 41%
• Neodymium lasers 41%
• Surface structure 37%
• Chemical industry 35%
• Drug products 33%
• Industrial applications 28%
• Silicon 24%
• Throughput 21%

Physics & Astronomy

• etching 70%
• dummies 41%
• porous silicon 33%
• drugs 31%
• YAG lasers 27%
• lasers 27%
• industries 25%
• reactors 23%
• optimization 20%
• silicon 16%

Chemistry

• Etching 83%
• Porosity 53%
• Surface 29%
• Chemical Industry 20%
• Surface Structure 18%
• Pharmaceutical 13%
• Surface Area 12%
• Drug 9%
• Application 5%