Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry

Yue Liu, Shujun Huang, Zonghua Zhang, Nan Gao, Feng Gao, Xiangqian Jiang

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

With the advent of intelligent manufacturing, phase measuring deflectometry (PMD) has been widely studied for the measurement of the three-dimensional (3D) shape of specular objects. However, existing PMDs cannot measure objects having discontinuous specular surfaces. This paper presents a new direct PMD (DPMD) method that measures the full-field 3D shape of complicated specular objects. A mathematical model is derived to directly relate an absolute phase map to depth data, instead of the gradient. Two relevant parameters are calibrated using a machine vision-based method. On the basis of the derived model, a full-field 3D measuring system was developed. The accuracy of the system was evaluated using a mirror with known positions along an accurate translating stage. The 3D shape of a monolithic multi-mirror array having multiple specular surfaces was measured. Experimental results show that the proposed DPMD method can obtain the full-field 3D shape of specular objects having isolated and/or discontinuous surfaces accurately and effectively.
LanguageEnglish
Article number10293
Pages1-8
Number of pages8
JournalScientific Reports
Volume7
Early online date31 Aug 2017
DOIs
Publication statusPublished - 1 Dec 2017

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Polarization mode dispersion
Mirrors
Computer vision
Mathematical models

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title = "Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry",
abstract = "With the advent of intelligent manufacturing, phase measuring deflectometry (PMD) has been widely studied for the measurement of the three-dimensional (3D) shape of specular objects. However, existing PMDs cannot measure objects having discontinuous specular surfaces. This paper presents a new direct PMD (DPMD) method that measures the full-field 3D shape of complicated specular objects. A mathematical model is derived to directly relate an absolute phase map to depth data, instead of the gradient. Two relevant parameters are calibrated using a machine vision-based method. On the basis of the derived model, a full-field 3D measuring system was developed. The accuracy of the system was evaluated using a mirror with known positions along an accurate translating stage. The 3D shape of a monolithic multi-mirror array having multiple specular surfaces was measured. Experimental results show that the proposed DPMD method can obtain the full-field 3D shape of specular objects having isolated and/or discontinuous surfaces accurately and effectively.",
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Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry. / Liu, Yue; Huang, Shujun; Zhang, Zonghua; Gao, Nan; Gao, Feng; Jiang, Xiangqian.

In: Scientific Reports, Vol. 7, 10293, 01.12.2017, p. 1-8.

Research output: Contribution to journalArticle

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AU - Liu, Yue

AU - Huang, Shujun

AU - Zhang, Zonghua

AU - Gao, Nan

AU - Gao, Feng

AU - Jiang, Xiangqian

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AB - With the advent of intelligent manufacturing, phase measuring deflectometry (PMD) has been widely studied for the measurement of the three-dimensional (3D) shape of specular objects. However, existing PMDs cannot measure objects having discontinuous specular surfaces. This paper presents a new direct PMD (DPMD) method that measures the full-field 3D shape of complicated specular objects. A mathematical model is derived to directly relate an absolute phase map to depth data, instead of the gradient. Two relevant parameters are calibrated using a machine vision-based method. On the basis of the derived model, a full-field 3D measuring system was developed. The accuracy of the system was evaluated using a mirror with known positions along an accurate translating stage. The 3D shape of a monolithic multi-mirror array having multiple specular surfaces was measured. Experimental results show that the proposed DPMD method can obtain the full-field 3D shape of specular objects having isolated and/or discontinuous surfaces accurately and effectively.

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KW - Optical metrology

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