Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

Zonghua Zhang, Yue Liu, Shujun Huang, Zhenqi Niu, Jiao Guo, Nan Gao, Feng Gao, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

20 Citations (Scopus)


This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.

Original languageEnglish
Title of host publicationOptical Metrology and Inspection for Industrial Applications IV
EditorsSen Han, Toru Yoshizawa, Song Zhang
Number of pages11
ISBN (Electronic)9781510604667
ISBN (Print)9781510604650
Publication statusPublished - 24 Nov 2016
EventSPIE/COS Photonics Asia 2016 - Beijing, China
Duration: 12 Oct 201614 Oct 2016
Conference number: IV
https://spie.org/PA16/conferencedetails/optical-metrology-and-inspection?SSO=1 (Link to Conference Details )

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSPIE/COS Photonics Asia 2016
Internet address


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