Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

Zonghua Zhang; Yue Liu; Shujun Huang; Zhenqi Niu; Jiao Guo; Nan Gao; Feng Gao; Xiangqian Jiang

doi:10.1117/12.2246144

Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

Zonghua Zhang, Yue Liu, Shujun Huang, Zhenqi Niu, Jiao Guo, Nan Gao, Feng Gao, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

20 Citations (Scopus)

Abstract

This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.

Original language	English
Title of host publication	Optical Metrology and Inspection for Industrial Applications IV
Editors	Sen Han, Toru Yoshizawa, Song Zhang
Publisher	SPIE
Number of pages	11
Volume	10023
ISBN (Electronic)	9781510604667
ISBN (Print)	9781510604650
DOIs	https://doi.org/10.1117/12.2246144
Publication status	Published - 24 Nov 2016
Event	SPIE/COS Photonics Asia 2016 - Beijing, China Duration: 12 Oct 2016 → 14 Oct 2016 Conference number: IV https://spie.org/PA16/conferencedetails/optical-metrology-and-inspection?SSO=1 (Link to Conference Details )

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	10023
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	SPIE/COS Photonics Asia 2016
Country/Territory	China
City	Beijing
Period	12/10/16 → 14/10/16
Internet address	https://spie.org/PA16/conferencedetails/optical-metrology-and-inspection?SSO=1 (Link to Conference Details )

Access to Document

10.1117/12.2246144Licence: Other

Cite this

Zhang, Z., Liu, Y., Huang, S., Niu, Z., Guo, J., Gao, N., Gao, F., & Jiang, X. (2016). Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship. In S. Han, T. Yoshizawa, & S. Zhang (Eds.), Optical Metrology and Inspection for Industrial Applications IV (Vol. 10023). [100230X] (Proceedings of SPIE; Vol. 10023). SPIE. https://doi.org/10.1117/12.2246144

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title = "Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship",

abstract = "This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.",

keywords = "discontinuous surface measurement, phase calculation, phase deflectometry, Specular object 3D measurement, system calibration",

author = "Zonghua Zhang and Yue Liu and Shujun Huang and Zhenqi Niu and Jiao Guo and Nan Gao and Feng Gao and Xiangqian Jiang",

year = "2016",

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editor = "Sen Han and Toru Yoshizawa and Song Zhang",

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note = "SPIE/COS Photonics Asia 2016 ; Conference date: 12-10-2016 Through 14-10-2016",

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Zhang, Z, Liu, Y, Huang, S, Niu, Z, Guo, J, Gao, N, Gao, F & Jiang, X 2016, Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship. in S Han, T Yoshizawa & S Zhang (eds), Optical Metrology and Inspection for Industrial Applications IV. vol. 10023, 100230X, Proceedings of SPIE, vol. 10023, SPIE, SPIE/COS Photonics Asia 2016, Beijing, China, 12/10/16. https://doi.org/10.1117/12.2246144

Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship. / Zhang, Zonghua; Liu, Yue; Huang, Shujun et al.

Optical Metrology and Inspection for Industrial Applications IV. ed. / Sen Han; Toru Yoshizawa; Song Zhang. Vol. 10023 SPIE, 2016. 100230X (Proceedings of SPIE; Vol. 10023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

AU - Zhang, Zonghua

AU - Liu, Yue

AU - Huang, Shujun

AU - Niu, Zhenqi

AU - Guo, Jiao

AU - Gao, Nan

AU - Gao, Feng

AU - Jiang, Xiangqian

N1 - Conference code: IV

PY - 2016/11/24

Y1 - 2016/11/24

N2 - This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.

AB - This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.

KW - discontinuous surface measurement

KW - phase calculation

KW - phase deflectometry

KW - Specular object 3D measurement

KW - system calibration

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M3 - Conference contribution

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T3 - Proceedings of SPIE

BT - Optical Metrology and Inspection for Industrial Applications IV

A2 - Han, Sen

A2 - Yoshizawa, Toru

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PB - SPIE

T2 - SPIE/COS Photonics Asia 2016

Y2 - 12 October 2016 through 14 October 2016

ER -

Full-Field 3D Shape Measurement of Specular Surfaces by Direct Phase to Depth Relationship

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