Functions and three dimensional parameters of surface texture

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Abstract

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

Original languageEnglish
Title of host publicationFifth International Symposium on Instrumentation Science and Technology
EditorsJiubin Tan, Xianfang Wen
PublisherSPIE
Number of pages7
Volume7133
ISBN (Print)9780819473677
DOIs
Publication statusPublished - 12 Jan 2009
EventInternational Symposium on Instrumentation Science and Technology - Shenyang, China
Duration: 15 Sep 200918 Sep 2009
Conference number: 5

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume7133
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceInternational Symposium on Instrumentation Science and Technology
Abbreviated titleISIST'2009
CountryChina
CityShenyang
Period15/09/0918/09/09

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Qi, Q., Liu, X., & Jiang, X. (2009). Functions and three dimensional parameters of surface texture. In J. Tan, & X. Wen (Eds.), Fifth International Symposium on Instrumentation Science and Technology (Vol. 7133). [713303] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7133). SPIE. https://doi.org/10.1117/12.811358