Abstract
This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.
| Original language | English |
|---|---|
| Title of host publication | Fifth International Symposium on Instrumentation Science and Technology |
| Editors | Jiubin Tan, Xianfang Wen |
| Publisher | SPIE |
| Number of pages | 7 |
| Volume | 7133 |
| ISBN (Print) | 9780819473677 |
| DOIs | |
| Publication status | Published - 12 Jan 2009 |
| Event | 5th International Symposium on Instrumentation Science and Technology - Shenyang, China Duration: 15 Sep 2008 → 18 Sep 2008 Conference number: 5 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7133.toc |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 7133 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
Conference
| Conference | 5th International Symposium on Instrumentation Science and Technology |
|---|---|
| Abbreviated title | ISIST'2008 |
| Country/Territory | China |
| City | Shenyang |
| Period | 15/09/08 → 18/09/08 |
| Internet address |