Functions and three dimensional parameters of surface texture

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

Original languageEnglish
Article number713303
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7133
DOIs
Publication statusPublished - 12 Jan 2009
Event5th International Symposium on Instrumentation Science and Technology - Shenyang, China
Duration: 15 Sep 200918 Sep 2009
Conference number: 5

Fingerprint

Surface Texture
textures
Textures
Three-dimensional
Industrial Oils
Silicon wafers
Abrasion
abrasion
Wear of materials
Wafer
Silicon
wafers
engineering
Engineering
Zero
silicon

Cite this

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abstract = "This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.",
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AB - This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

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KW - Wear

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