Functions and three dimensional parameters of surface texture

Qunfen Qi; Xiaojun Liu; Xiangqian Jiang

doi:10.1117/12.811358

Functions and three dimensional parameters of surface texture

Qunfen Qi, Xiaojun Liu, Xiangqian Jiang

Huazhong University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

Abstract

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

Original language	English
Title of host publication	Fifth International Symposium on Instrumentation Science and Technology
Editors	Jiubin Tan, Xianfang Wen
Publisher	SPIE
Number of pages	7
Volume	7133
ISBN (Print)	9780819473677
DOIs	https://doi.org/10.1117/12.811358
Publication status	Published - 12 Jan 2009
Event	5th International Symposium on Instrumentation Science and Technology - Shenyang, China Duration: 15 Sept 2008 → 18 Sept 2008 Conference number: 5 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7133.toc

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	7133
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	5th International Symposium on Instrumentation Science and Technology
Abbreviated title	ISIST'2008
Country/Territory	China
City	Shenyang
Period	15/09/08 → 18/09/08
Internet address	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7133.toc

Access to Document

10.1117/12.811358Licence: Unspecified

Cite this

@inproceedings{ad432ef93f6f425099d96c35c3323ee2,

title = "Functions and three dimensional parameters of surface texture",

abstract = "This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.",

keywords = "Function, Surface texture, Three dimensional parameter, Wear",

author = "Qunfen Qi and Xiaojun Liu and Xiangqian Jiang",

year = "2009",

month = jan,

day = "12",

doi = "10.1117/12.811358",

language = "English",

isbn = "9780819473677 ",

volume = "7133",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Jiubin Tan and Xianfang Wen",

booktitle = "Fifth International Symposium on Instrumentation Science and Technology",

address = "United States",

note = "5th International Symposium on Instrumentation Science and Technology, ISIST'2008 ; Conference date: 15-09-2008 Through 18-09-2008",

url = "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7133.toc",

}

Qi, Q, Liu, X & Jiang, X 2009, Functions and three dimensional parameters of surface texture. in J Tan & X Wen (eds), Fifth International Symposium on Instrumentation Science and Technology. vol. 7133, 713303, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7133, SPIE, 5th International Symposium on Instrumentation Science and Technology, Shenyang, China, 15/09/08. https://doi.org/10.1117/12.811358

Functions and three dimensional parameters of surface texture. / Qi, Qunfen; Liu, Xiaojun; Jiang, Xiangqian.
Fifth International Symposium on Instrumentation Science and Technology. ed. / Jiubin Tan; Xianfang Wen. Vol. 7133 SPIE, 2009. 713303 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7133).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Functions and three dimensional parameters of surface texture

AU - Qi, Qunfen

AU - Liu, Xiaojun

AU - Jiang, Xiangqian

N1 - Conference code: 5

PY - 2009/1/12

Y1 - 2009/1/12

N2 - This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

AB - This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

KW - Function

KW - Surface texture

KW - Three dimensional parameter

KW - Wear

UR - https://www.scopus.com/pages/publications/62449189801

U2 - 10.1117/12.811358

DO - 10.1117/12.811358

M3 - Conference contribution

AN - SCOPUS:62449189801

SN - 9780819473677

VL - 7133

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Fifth International Symposium on Instrumentation Science and Technology

A2 - Tan, Jiubin

A2 - Wen, Xianfang

PB - SPIE

T2 - 5th International Symposium on Instrumentation Science and Technology

Y2 - 15 September 2008 through 18 September 2008

ER -

Functions and three dimensional parameters of surface texture

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this