Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The manufacture and fabrication of MST and microfluidic devices is now a hugely expanding technology with new applications stretching from electronics to biotechnology. A major technological hurdle for the mass production and development of these devices is the difficulties associated with the geometrical metrology and surface metrology. The difficulties lie around the ability to separate and quantify zones of differing planer height and then being able to analyse the topographies of the zones individually. Complicated surfaces pose particular difficulties in terms of establishing measurement datums and levelling data. These problems are further accentuated by the limited size of data sets available form the current metrology tools This paper makes use of edge detection and areal pattern analysis techniques to establish a basis for improved device characterisation for both MST and microfluidic devices.
Original languageEnglish
Title of host publicationProceedings of the 5th International Conference of the European society for precision engineering and nanotechnology
EditorsF. Chevrier, T. Taliercio, P. Falgayrettes, P. Gall-Borrut
Publishereuspen
Pages97-100
Number of pages4
Volume1
ISBN (Print)9299003505
Publication statusPublished - 2005
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology - Montpellier, France
Duration: 8 May 200511 May 2005
Conference number: 5

Conference

Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2005
CountryFrance
CityMontpellier
Period8/05/0511/05/05

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  • Cite this

    Blunt, L., Xiao, S., Jiang, J., & Scott, P. (2005). Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques. In F. Chevrier, T. Taliercio, P. Falgayrettes, & P. Gall-Borrut (Eds.), Proceedings of the 5th International Conference of the European society for precision engineering and nanotechnology (Vol. 1, pp. 97-100). euspen.