Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques

The manufacture and fabrication of MST and microfluidic devices is now a hugely expanding technology with new applications stretching from electronics to biotechnology. A major technological hurdle for the mass production and development of these devices is the difficulties associated with the geometrical metrology and surface metrology. The difficulties lie around the ability to separate and quantify zones of differing planer height and then being able to analyse the topographies of the zones individually. Complicated surfaces pose particular difficulties in terms of establishing measurement datums and levelling data. These problems are further accentuated by the limited size of data sets available form the current metrology tools This paper makes use of edge detection and areal pattern analysis techniques to establish a basis for improved device characterisation for both MST and microfluidic devices.