Grating technology for topography measurement of curved surfaces

Xiangqian Jiang, Tie Bang Xie, Cai Xian Yao, Zhu Li

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Citations (Scopus)

Abstract

In this paper a new grating technology for topography measurement of the curved surface is described. It adopts a laser-grating interferometry sensing system whose standard depends on the RCHD grating constant. The optical principle and system characteristics are discussed in detail. The results of principle experiment are given. Key words: Topography measurement of curved surface laser-grating interferometry sensing system grating interferometry reflective cylindric holographic diffractive (RCHD) grating.

Original languageEnglish
Title of host publicationMeasurement Technology and Intelligent Instruments
EditorsLi Zhu
PublisherSPIE
Pages554-557
Number of pages4
Volume2101
ISBN (Electronic)9780819413840
DOIs
Publication statusPublished - 22 Sep 1993
Externally publishedYes
EventMeasurement Technology and Intelligent Instruments 1993 - Wuhan, China
Duration: 29 Oct 19935 Nov 1993

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2101
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceMeasurement Technology and Intelligent Instruments 1993
Country/TerritoryChina
CityWuhan
Period29/10/935/11/93

Fingerprint

Dive into the research topics of 'Grating technology for topography measurement of curved surfaces'. Together they form a unique fingerprint.

Cite this