High resolution depth profile analysis of ultra thin high-κ Hf based films using MEIS compared with XTEM, XRF, SE and XPS

J. A. Van Den Berg, M. A. Reading, A. Parisini, M. Kolbe, B. Beckhoff, S. Ladas, M. Fried, P. Petrik, P. Bailey, T. Noakes, T. Conard, S. De Gendt

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Engineering & Materials Science