High resolution position measurement from dispersed reference interferometry using template matching

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Abstract

This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.

LanguageEnglish
Pages10103-10114
Number of pages12
JournalOptics Express
Volume24
Issue number9
Early online date29 Apr 2016
DOIs
Publication statusPublished - 2 May 2016

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interferometry
templates
high resolution
correlation coefficients
linearity

Cite this

@article{f6cc6ec966e147dba44c74e1048b5c95,
title = "High resolution position measurement from dispersed reference interferometry using template matching",
abstract = "This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.",
author = "James Williamson and Haydn Martin and Xiangqian Jiang",
year = "2016",
month = "5",
day = "2",
doi = "10.1364/OE.24.010103",
language = "English",
volume = "24",
pages = "10103--10114",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "9",

}

TY - JOUR

T1 - High resolution position measurement from dispersed reference interferometry using template matching

AU - Williamson, James

AU - Martin, Haydn

AU - Jiang, Xiangqian

PY - 2016/5/2

Y1 - 2016/5/2

N2 - This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.

AB - This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.

UR - http://www.scopus.com/inward/record.url?scp=84973397866&partnerID=8YFLogxK

U2 - 10.1364/OE.24.010103

DO - 10.1364/OE.24.010103

M3 - Article

VL - 24

SP - 10103

EP - 10114

JO - Optics Express

T2 - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 9

ER -