Abstract
This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.
| Language | English |
|---|---|
| Pages | 10103-10114 |
| Number of pages | 12 |
| Journal | Optics Express |
| Volume | 24 |
| Issue number | 9 |
| Early online date | 29 Apr 2016 |
| DOIs | |
| Publication status | Published - 2 May 2016 |
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High resolution position measurement from dispersed reference interferometry using template matching. / Williamson, James; Martin, Haydn; Jiang, Xiangqian.
In: Optics Express, Vol. 24, No. 9, 02.05.2016, p. 10103-10114.Research output: Contribution to journal › Article
TY - JOUR
T1 - High resolution position measurement from dispersed reference interferometry using template matching
AU - Williamson, James
AU - Martin, Haydn
AU - Jiang, Xiangqian
PY - 2016/5/2
Y1 - 2016/5/2
N2 - This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.
AB - This paper describes a method to extract high resolution position data from a dispersed reference interferometry (DRI) by applying a template matching technique to the acquired spectral interferograms. Calculation of the correlation coefficient between windowed spectral interferograms acquired from the DRI apparatus and a set of numerically calculated template interferograms allows the absolute determination of position with nanometer resolution. Both the operating principle of the DRI apparatus and implementation of the template matching method is presented. Experimental validation of the method is provided through the demonstration of position tracking and an assessment of linearity, repeatability and noise performance.
UR - http://www.scopus.com/inward/record.url?scp=84973397866&partnerID=8YFLogxK
U2 - 10.1364/OE.24.010103
DO - 10.1364/OE.24.010103
M3 - Article
VL - 24
SP - 10103
EP - 10114
JO - Optics Express
T2 - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 9
ER -