TY - JOUR
T1 - High Sensitivity SERS Substrate of a Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology
AU - Wu, Hsing Yu
AU - Lin, Hung Chun
AU - Hung, Guan Yi
AU - Tu, Chi Shun
AU - Liu, Ting Yu
AU - Hong, Chung Hung
AU - Yu, Guoyu
AU - Hsu, Jin Cherng
N1 - Funding Information:
This research was funded by the Ministry of Science and Technology of Taiwan, grant numbers MOST 108-2923-M-030-001-MY2 and MOST 110-2112-M-030-003.
Publisher Copyright:
© 2022 by the authors.
PY - 2022/8/10
Y1 - 2022/8/10
N2 - Surface-enhanced Raman spectroscopy (SERS) is commonly used for super-selective analysis through nanostructured silver layers in the environment, food quality, biomedicine, and materials science. To fabricate a high-sensitivity but a more accessible device of SERS, DC magnetron sputtering technology was used to realize high sensitivity, low cost, a stable deposition rate, and rapid mass production. This study investigated various thicknesses of a silver film ranging from 3.0 to 12.1 nm by field emission scanning electron microscope, X-ray diffraction, and X-ray photoelectron spectroscopy. In the rhodamine 6G (R6G) testing irradiated by a He-Ne laser beam, the analytical enhancement factor (AEF) of 9.35 × 108, the limit of detection (LOD) of 10−8 M, and the relative standard deviation (RSD) of 1.61% were better than the other SERS substrates fabricated by the same DC sputtering process because the results showed that the 6 nm thickness silver layer had the highest sensitivity, stability, and lifetime. The paraquat and acetylcholine analytes were further investigated and high sensitivity was also achievable. The proposed SERS samples were evaluated and stored in a low humidity environment for up to forty weeks, and no spectrum attenuation could be detected. Soon, the proposed technology to fabricate high sensitivity, repeatability, and robust SERS substrate will be an optimized process technology in multiple applications.
AB - Surface-enhanced Raman spectroscopy (SERS) is commonly used for super-selective analysis through nanostructured silver layers in the environment, food quality, biomedicine, and materials science. To fabricate a high-sensitivity but a more accessible device of SERS, DC magnetron sputtering technology was used to realize high sensitivity, low cost, a stable deposition rate, and rapid mass production. This study investigated various thicknesses of a silver film ranging from 3.0 to 12.1 nm by field emission scanning electron microscope, X-ray diffraction, and X-ray photoelectron spectroscopy. In the rhodamine 6G (R6G) testing irradiated by a He-Ne laser beam, the analytical enhancement factor (AEF) of 9.35 × 108, the limit of detection (LOD) of 10−8 M, and the relative standard deviation (RSD) of 1.61% were better than the other SERS substrates fabricated by the same DC sputtering process because the results showed that the 6 nm thickness silver layer had the highest sensitivity, stability, and lifetime. The paraquat and acetylcholine analytes were further investigated and high sensitivity was also achievable. The proposed SERS samples were evaluated and stored in a low humidity environment for up to forty weeks, and no spectrum attenuation could be detected. Soon, the proposed technology to fabricate high sensitivity, repeatability, and robust SERS substrate will be an optimized process technology in multiple applications.
KW - analytical enhancement factor (AEF)
KW - DC magnetron sputtering
KW - hotspot
KW - limit of detection (LOD)
KW - relative standard deviation (RSD)
KW - rhodamine 6G (R6G)
KW - SERS substrate
KW - silver nanoparticle (AgNP)
KW - surface-enhanced Raman scattering (SERS)
UR - http://www.scopus.com/inward/record.url?scp=85137397786&partnerID=8YFLogxK
U2 - 10.3390/nano12162742
DO - 10.3390/nano12162742
M3 - Article
AN - SCOPUS:85137397786
VL - 12
JO - Nanomaterials
JF - Nanomaterials
SN - 2079-4991
IS - 16
M1 - 2742
ER -