Hybrid Photonic Chip Interferometer for Embedded Metrology

Engineering

• Photonics 100%
• Motherboard 100%
• Optical Hybrid 100%
• Optical Probe 100%
• Silicon Dioxide 50%
• Test Result 50%
• Objective Lens 50%
• Surface Height 50%
• Laser Light 50%
• Waveguide 50%
• Measurand 50%
• Constituent Component 50%
• Gain Block 50%
• Photodiode 50%
• Laser Module 50%
• Thin Film Filter 50%
• Component Device 50%
• Evanescent 50%
• Longitudinal Mode 50%
• Pathlength 50%
• Sensor System 50%
• External Cavity 50%
• Electro-Optics 50%

Keyphrases

• Metrology 100%
• Interferometer 100%
• Hybrid Photonics 100%
• Photonic chip 100%
• Optical chip 50%
• Manufacturing Platform 33%
• Motherboard 33%
• Optical Probe 33%
• Phase Shift 16%
• Semiconductors 16%
• Objective Lens 16%
• Silica 16%
• Measurand 16%
• Gain Block 16%
• Collimating 16%
• Sensor Systems 16%
• Longitudinal Mode 16%
• Device Packaging 16%
• Evanescent Coupler 16%
• Electro-optic 16%
• Device Integration 16%
• Laser Light 16%
• Surface Height 16%
• Waveguide Structure 16%
• Optical Components 16%
• Overall Design 16%
• Photodiode 16%
• Stylus 16%
• Length Change 16%
• Increased Throughput 16%
• On-Silicon 16%
• Laser Module 16%
• Diffraction Grating 16%
• External Cavity Diode Laser 16%
• Path Length 16%
• Tunable Laser 16%
• Multilayer Thin Films 16%
• Wavelength Scanning 16%
• Thin Film Filter 16%
• Module Base 16%
• Integrated Optics 16%
• Sweeping 16%