Implementation of wavelength scanning interferometry for R2R flexible PV barrier films

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Roll to Roll manufacture of nano-scale thin film layers faces the challenge of micro/nano-scale defects appearing in the films. Atomic Layer Deposition (ALD) coatings of aluminium oxide, Al2O3 are used as barrier layers for photovoltaic (PV) solar modules where the primary function of the barrier layer is to prevent the water vapour ingress to the PV cells. Barrier layer defects have been shown to have negative impact on the performance of the barrier layers. Poor barriers cause module degradation resulting in reduced PV efficiency and lifespan. In order to ensure the quality of manufacture of the barriers, defects should be detected during the barrier production process and the information used to optimise the production process. This paper introduces, as part of EU funded NanoMend project, a full solution for inspection of entire surface regions of Al2O3 barrier films across large area substrates. The solution principle is based on implementing an opto-mechanical in-process inspection system to measure the significant defects using a wavelength scanning interferometer (WSI) embedded within the film-rewinder stage and integrated with the substrate translation and kinematic stages. The opto-mechanical system allows full surface measurement over full substrate widths of approximately 0.5m. The system provides an auto-focus for the WSI with an accuracy and repeatability better than 6 μm at optimum optical alignment conditions. The system is combined with a porous air-bearing conveyor used to hold the film web at fixed height within the focal depth of WSI objective lens and with height variation of < 5 μm under optimum vacuum pressure. The paper also outlines a computerised data handling process that can be used to assess hundreds/thousands of measurement files automatically by extracting and monitoring the areal root mean square roughness parameter (Sq) and defect statistics. Measurement results for functionally significant defects with lateral size > 3 μm is also presented as a case study to highlight the system capability.

LanguageEnglish
Title of host publicationProceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
Publishereuspen
Pages199-200
Number of pages2
ISBN (Electronic)9780956679079
Publication statusPublished - 2015
Event15th International Conference of the European Society for Precision Engineering and Nanotechnology - Leuven, Belgium
Duration: 1 Jun 20155 Jun 2015
https://www.euspen.eu/ (Link to EUSPEN Website )

Conference

Conference15th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2015
CountryBelgium
CityLeuven
Period1/06/155/06/15
Internet address

Fingerprint

barrier layers
Interferometry
interferometry
Interferometers
Scanning
Wavelength
Defects
scanning
interferometers
defects
wavelengths
inspection
Bearings (structural)
Substrates
modules
Inspection
gas bearings
Atomic layer deposition
Aluminum Oxide
Photovoltaic cells

Cite this

Blunt, L., Muhamedsalih, H., Elrawemi, M., Martin, H., Hamersma, I., Gao, F., & Jiang, X. (2015). Implementation of wavelength scanning interferometry for R2R flexible PV barrier films. In Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 (pp. 199-200). euspen.
Blunt, Liam ; Muhamedsalih, Hussam ; Elrawemi, Mohamed ; Martin, Haydn ; Hamersma, Ivo ; Gao, Feng ; Jiang, Xiangqian. / Implementation of wavelength scanning interferometry for R2R flexible PV barrier films. Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015. euspen, 2015. pp. 199-200
@inproceedings{edbb49e0d13a4e2b8bcf7943c0e7b3f7,
title = "Implementation of wavelength scanning interferometry for R2R flexible PV barrier films",
abstract = "Roll to Roll manufacture of nano-scale thin film layers faces the challenge of micro/nano-scale defects appearing in the films. Atomic Layer Deposition (ALD) coatings of aluminium oxide, Al2O3 are used as barrier layers for photovoltaic (PV) solar modules where the primary function of the barrier layer is to prevent the water vapour ingress to the PV cells. Barrier layer defects have been shown to have negative impact on the performance of the barrier layers. Poor barriers cause module degradation resulting in reduced PV efficiency and lifespan. In order to ensure the quality of manufacture of the barriers, defects should be detected during the barrier production process and the information used to optimise the production process. This paper introduces, as part of EU funded NanoMend project, a full solution for inspection of entire surface regions of Al2O3 barrier films across large area substrates. The solution principle is based on implementing an opto-mechanical in-process inspection system to measure the significant defects using a wavelength scanning interferometer (WSI) embedded within the film-rewinder stage and integrated with the substrate translation and kinematic stages. The opto-mechanical system allows full surface measurement over full substrate widths of approximately 0.5m. The system provides an auto-focus for the WSI with an accuracy and repeatability better than 6 μm at optimum optical alignment conditions. The system is combined with a porous air-bearing conveyor used to hold the film web at fixed height within the focal depth of WSI objective lens and with height variation of < 5 μm under optimum vacuum pressure. The paper also outlines a computerised data handling process that can be used to assess hundreds/thousands of measurement files automatically by extracting and monitoring the areal root mean square roughness parameter (Sq) and defect statistics. Measurement results for functionally significant defects with lateral size > 3 μm is also presented as a case study to highlight the system capability.",
keywords = "Al<inf>2</inf>O<inf>3</inf> barrier, Data handling, Defect measurement, Opto-mechanical inspection system, Roll to roll process, Wavelength scanning interferometer, WSI",
author = "Liam Blunt and Hussam Muhamedsalih and Mohamed Elrawemi and Haydn Martin and Ivo Hamersma and Feng Gao and Xiangqian Jiang",
year = "2015",
language = "English",
pages = "199--200",
booktitle = "Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015",
publisher = "euspen",

}

Blunt, L, Muhamedsalih, H, Elrawemi, M, Martin, H, Hamersma, I, Gao, F & Jiang, X 2015, Implementation of wavelength scanning interferometry for R2R flexible PV barrier films. in Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015. euspen, pp. 199-200, 15th International Conference of the European Society for Precision Engineering and Nanotechnology, Leuven, Belgium, 1/06/15.

Implementation of wavelength scanning interferometry for R2R flexible PV barrier films. / Blunt, Liam; Muhamedsalih, Hussam; Elrawemi, Mohamed; Martin, Haydn; Hamersma, Ivo; Gao, Feng; Jiang, Xiangqian.

Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015. euspen, 2015. p. 199-200.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Implementation of wavelength scanning interferometry for R2R flexible PV barrier films

AU - Blunt, Liam

AU - Muhamedsalih, Hussam

AU - Elrawemi, Mohamed

AU - Martin, Haydn

AU - Hamersma, Ivo

AU - Gao, Feng

AU - Jiang, Xiangqian

PY - 2015

Y1 - 2015

N2 - Roll to Roll manufacture of nano-scale thin film layers faces the challenge of micro/nano-scale defects appearing in the films. Atomic Layer Deposition (ALD) coatings of aluminium oxide, Al2O3 are used as barrier layers for photovoltaic (PV) solar modules where the primary function of the barrier layer is to prevent the water vapour ingress to the PV cells. Barrier layer defects have been shown to have negative impact on the performance of the barrier layers. Poor barriers cause module degradation resulting in reduced PV efficiency and lifespan. In order to ensure the quality of manufacture of the barriers, defects should be detected during the barrier production process and the information used to optimise the production process. This paper introduces, as part of EU funded NanoMend project, a full solution for inspection of entire surface regions of Al2O3 barrier films across large area substrates. The solution principle is based on implementing an opto-mechanical in-process inspection system to measure the significant defects using a wavelength scanning interferometer (WSI) embedded within the film-rewinder stage and integrated with the substrate translation and kinematic stages. The opto-mechanical system allows full surface measurement over full substrate widths of approximately 0.5m. The system provides an auto-focus for the WSI with an accuracy and repeatability better than 6 μm at optimum optical alignment conditions. The system is combined with a porous air-bearing conveyor used to hold the film web at fixed height within the focal depth of WSI objective lens and with height variation of < 5 μm under optimum vacuum pressure. The paper also outlines a computerised data handling process that can be used to assess hundreds/thousands of measurement files automatically by extracting and monitoring the areal root mean square roughness parameter (Sq) and defect statistics. Measurement results for functionally significant defects with lateral size > 3 μm is also presented as a case study to highlight the system capability.

AB - Roll to Roll manufacture of nano-scale thin film layers faces the challenge of micro/nano-scale defects appearing in the films. Atomic Layer Deposition (ALD) coatings of aluminium oxide, Al2O3 are used as barrier layers for photovoltaic (PV) solar modules where the primary function of the barrier layer is to prevent the water vapour ingress to the PV cells. Barrier layer defects have been shown to have negative impact on the performance of the barrier layers. Poor barriers cause module degradation resulting in reduced PV efficiency and lifespan. In order to ensure the quality of manufacture of the barriers, defects should be detected during the barrier production process and the information used to optimise the production process. This paper introduces, as part of EU funded NanoMend project, a full solution for inspection of entire surface regions of Al2O3 barrier films across large area substrates. The solution principle is based on implementing an opto-mechanical in-process inspection system to measure the significant defects using a wavelength scanning interferometer (WSI) embedded within the film-rewinder stage and integrated with the substrate translation and kinematic stages. The opto-mechanical system allows full surface measurement over full substrate widths of approximately 0.5m. The system provides an auto-focus for the WSI with an accuracy and repeatability better than 6 μm at optimum optical alignment conditions. The system is combined with a porous air-bearing conveyor used to hold the film web at fixed height within the focal depth of WSI objective lens and with height variation of < 5 μm under optimum vacuum pressure. The paper also outlines a computerised data handling process that can be used to assess hundreds/thousands of measurement files automatically by extracting and monitoring the areal root mean square roughness parameter (Sq) and defect statistics. Measurement results for functionally significant defects with lateral size > 3 μm is also presented as a case study to highlight the system capability.

KW - Al<inf>2</inf>O<inf>3</inf> barrier

KW - Data handling

KW - Defect measurement

KW - Opto-mechanical inspection system

KW - Roll to roll process

KW - Wavelength scanning interferometer

KW - WSI

UR - http://www.scopus.com/inward/record.url?scp=84936117517&partnerID=8YFLogxK

M3 - Conference contribution

SP - 199

EP - 200

BT - Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015

PB - euspen

ER -

Blunt L, Muhamedsalih H, Elrawemi M, Martin H, Hamersma I, Gao F et al. Implementation of wavelength scanning interferometry for R2R flexible PV barrier films. In Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015. euspen. 2015. p. 199-200