In-line metrology for defect assessment on large area Roll 2 Roll substrates

Liam Blunt, Leigh Fleming, Mohamed Elrawemi, David Robbins, Hussam Muhamedsalih

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on work carried out as part of the EU funded research project “Nanomend”. The project seeks to develop integrated process inspection, cleaning, repair for nano-scale thin films on large area substrates. In order to prevent water ingress into flexible PV modules they are coated with a protective barrier layer of Al2O3 using atomic layer deposition (ALD) technique. Unfortunately defects in this layer have been shown to reduce module efficiency
over a period of time due to water vapour ingress. The present work concentrates on defect detection and reports on the use of areal surface metrology parameters to correlate defect morphology with water vapour transmission rate (WVTR) through the protective barrier coatings. The use of advanced segmentation techniques is demonstrated where topographic information on functionally significant defects can be extracted and
quantified. The work also reports on the deployment of new in line interferometric optical sensors designed to measure and catalogue the defect distribution and size where they are present in the barrier film. The sensors have built-in environmental vibration compensation and are being deployed on a demonstrator system at a Roll2Roll production facility in the UK.
LanguageEnglish
Title of host publication 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014)
PublisherInternational Measurement Confederation (IMEKO)
Pages1-6
Number of pages6
ISBN (Print)9781632667311
Publication statusPublished - Sep 2014
Event11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry - Tsukuba, Japan
Duration: 3 Sep 20145 Sep 2014

Conference

Conference11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
Abbreviated titleLMPMI IMEKO TC14
CountryJapan
CityTsukuba
Period3/09/145/09/14

Fingerprint

metrology
defects
water vapor
modules
research projects
optical measuring instruments
barrier layers
atomic layer epitaxy
cleaning
catalogs
inspection
coatings
vibration
sensors
thin films
water

Cite this

Blunt, L., Fleming, L., Elrawemi, M., Robbins, D., & Muhamedsalih, H. (2014). In-line metrology for defect assessment on large area Roll 2 Roll substrates. In 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014) (pp. 1-6). International Measurement Confederation (IMEKO).
Blunt, Liam ; Fleming, Leigh ; Elrawemi, Mohamed ; Robbins, David ; Muhamedsalih, Hussam. / In-line metrology for defect assessment on large area Roll 2 Roll substrates. 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014). International Measurement Confederation (IMEKO), 2014. pp. 1-6
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Blunt, L, Fleming, L, Elrawemi, M, Robbins, D & Muhamedsalih, H 2014, In-line metrology for defect assessment on large area Roll 2 Roll substrates. in 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014). International Measurement Confederation (IMEKO), pp. 1-6, 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, Tsukuba, Japan, 3/09/14.

In-line metrology for defect assessment on large area Roll 2 Roll substrates. / Blunt, Liam; Fleming, Leigh; Elrawemi, Mohamed; Robbins, David; Muhamedsalih, Hussam.

11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014). International Measurement Confederation (IMEKO), 2014. p. 1-6.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper reports on work carried out as part of the EU funded research project “Nanomend”. The project seeks to develop integrated process inspection, cleaning, repair for nano-scale thin films on large area substrates. In order to prevent water ingress into flexible PV modules they are coated with a protective barrier layer of Al2O3 using atomic layer deposition (ALD) technique. Unfortunately defects in this layer have been shown to reduce module efficiencyover a period of time due to water vapour ingress. The present work concentrates on defect detection and reports on the use of areal surface metrology parameters to correlate defect morphology with water vapour transmission rate (WVTR) through the protective barrier coatings. The use of advanced segmentation techniques is demonstrated where topographic information on functionally significant defects can be extracted andquantified. The work also reports on the deployment of new in line interferometric optical sensors designed to measure and catalogue the defect distribution and size where they are present in the barrier film. The sensors have built-in environmental vibration compensation and are being deployed on a demonstrator system at a Roll2Roll production facility in the UK.

AB - This paper reports on work carried out as part of the EU funded research project “Nanomend”. The project seeks to develop integrated process inspection, cleaning, repair for nano-scale thin films on large area substrates. In order to prevent water ingress into flexible PV modules they are coated with a protective barrier layer of Al2O3 using atomic layer deposition (ALD) technique. Unfortunately defects in this layer have been shown to reduce module efficiencyover a period of time due to water vapour ingress. The present work concentrates on defect detection and reports on the use of areal surface metrology parameters to correlate defect morphology with water vapour transmission rate (WVTR) through the protective barrier coatings. The use of advanced segmentation techniques is demonstrated where topographic information on functionally significant defects can be extracted andquantified. The work also reports on the deployment of new in line interferometric optical sensors designed to measure and catalogue the defect distribution and size where they are present in the barrier film. The sensors have built-in environmental vibration compensation and are being deployed on a demonstrator system at a Roll2Roll production facility in the UK.

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Blunt L, Fleming L, Elrawemi M, Robbins D, Muhamedsalih H. In-line metrology for defect assessment on large area Roll 2 Roll substrates. In 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI 2014). International Measurement Confederation (IMEKO). 2014. p. 1-6